CA1020905A - Cathode a pulverisation demontable - Google Patents

Cathode a pulverisation demontable

Info

Publication number
CA1020905A
CA1020905A CA179,024A CA179024A CA1020905A CA 1020905 A CA1020905 A CA 1020905A CA 179024 A CA179024 A CA 179024A CA 1020905 A CA1020905 A CA 1020905A
Authority
CA
Canada
Prior art keywords
demountable
sputtering cathode
sputtering
cathode
demountable sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA179,024A
Other languages
English (en)
Other versions
CA179024S (en
Inventor
Alan Walsh
Peter Hannaford
David S. Gough
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Scientific and Industrial Research Organization CSIRO
Original Assignee
Commonwealth Scientific and Industrial Research Organization CSIRO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Scientific and Industrial Research Organization CSIRO filed Critical Commonwealth Scientific and Industrial Research Organization CSIRO
Application granted granted Critical
Publication of CA1020905A publication Critical patent/CA1020905A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic beam generation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/74—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using flameless atomising, e.g. graphite furnaces

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CA179,024A 1972-08-18 1973-08-17 Cathode a pulverisation demontable Expired CA1020905A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPB014772 1972-08-18

Publications (1)

Publication Number Publication Date
CA1020905A true CA1020905A (fr) 1977-11-15

Family

ID=3765268

Family Applications (1)

Application Number Title Priority Date Filing Date
CA179,024A Expired CA1020905A (fr) 1972-08-18 1973-08-17 Cathode a pulverisation demontable

Country Status (6)

Country Link
US (1) US3876305A (fr)
JP (1) JPS5713817B2 (fr)
CA (1) CA1020905A (fr)
DE (1) DE2341204A1 (fr)
GB (1) GB1435597A (fr)
NL (1) NL7311382A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845041A (en) * 1985-11-20 1989-07-04 Analyte Corporation Atomic-absorption sputtering chamber and system
DE3605911A1 (de) * 1986-02-24 1987-08-27 Ges Foerderung Spektrochemie Glimmentladungslampe sowie ihre verwendung
US4824249A (en) * 1986-04-16 1989-04-25 Chamber Ridge Pty. Ltd. Systems for the direct analysis of solid samples by atomic emission spectroscopy
FI81453C (fi) * 1988-06-22 1990-10-10 Outokumpu Oy Analysatortaetning.
US5006706A (en) * 1989-05-31 1991-04-09 Clemson University Analytical method and apparatus
US5325021A (en) * 1992-04-09 1994-06-28 Clemson University Radio-frequency powered glow discharge device and method with high voltage interface
KR100924287B1 (ko) * 2007-05-10 2009-10-30 한국과학기술연구원 양광주가 존재하지 않는 직류 전원 플라스마 증착 장치와,양광주를 배제한 상태에서의 물질 증착 방법 및 이에 의해제조된 다이아몬드 박막
US9536725B2 (en) 2013-02-05 2017-01-03 Clemson University Means of introducing an analyte into liquid sampling atmospheric pressure glow discharge

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU414987B2 (en) * 1968-05-01 1971-07-13 Commonwealth Scientific And Industrial Research Organization Improvements in or relating to atomic absorption spectroscopy

Also Published As

Publication number Publication date
US3876305A (en) 1975-04-08
DE2341204A1 (de) 1974-02-28
NL7311382A (fr) 1974-02-20
JPS5713817B2 (fr) 1982-03-19
JPS4987389A (fr) 1974-08-21
GB1435597A (en) 1976-05-12

Similar Documents

Publication Publication Date Title
CA1003964A (en) Magnetron cathode
CA1020905A (fr) Cathode a pulverisation demontable
CA979120A (en) Magnetron
CA995800A (en) Photocathode manufacture
AU475143B2 (en) electrode
AU5709073A (en) Trialkoxycinnamoylaminocarbon acid
CA1012600A (en) Dispenser cathodes
CA988169A (en) Electrode
AU443963B2 (en) New nitroimidazolyl-triazolo-pyridazines
AU469111B2 (en) New 2-benzoyl-3-amino-pyridines
CA1030589A (fr) Cathode a decharge pour cyclotron
CA1003109A (en) Magnetrons
CA915628A (en) Anode structure
AU451929B2 (en) Electrode
AU465750B2 (en) Cathode sputtering apparatus
CA962227A (en) Anode fitting
CA913565A (en) Anode assembly
AU3093871A (en) Cathode sputtering apparatus
CA915629A (en) Dimensionally stable anode construction
CA917303A (en) Magnetrons
CA988882A (en) Cathode holder
CA897822A (en) Low voltage a. c. magnetron
CA907676A (en) Electron gun
CA913688A (en) Electron gun
CA890195A (en) Slide-spark electrode system