BRPI0810414A2 - Saco em recipiente integralmente moldado por sopro que tem uma camada interna e uma camada externa feita do mesmo material e pré-forma para sua fabricação - Google Patents
Saco em recipiente integralmente moldado por sopro que tem uma camada interna e uma camada externa feita do mesmo material e pré-forma para sua fabricaçãoInfo
- Publication number
- BRPI0810414A2 BRPI0810414A2 BRPI0810414-0A2A BRPI0810414A BRPI0810414A2 BR PI0810414 A2 BRPI0810414 A2 BR PI0810414A2 BR PI0810414 A BRPI0810414 A BR PI0810414A BR PI0810414 A2 BRPI0810414 A2 BR PI0810414A2
- Authority
- BR
- Brazil
- Prior art keywords
- bag
- manufacture
- same material
- fully formulated
- layer made
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/785,745 US20080259298A1 (en) | 2007-04-19 | 2007-04-19 | Lithographic apparatus and device manufacturing method |
PCT/EP2008/054770 WO2008129016A1 (en) | 2007-04-19 | 2008-04-18 | Integrally blow-moulded bag-in-container having an inner layer and the outer layer made of the same material and preform for making it |
Publications (1)
Publication Number | Publication Date |
---|---|
BRPI0810414A2 true BRPI0810414A2 (pt) | 2014-10-14 |
Family
ID=39691234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BRPI0810414-0A2A BRPI0810414A2 (pt) | 2007-04-19 | 2008-04-18 | Saco em recipiente integralmente moldado por sopro que tem uma camada interna e uma camada externa feita do mesmo material e pré-forma para sua fabricação |
Country Status (4)
Country | Link |
---|---|
US (1) | US20080259298A1 (pt) |
JP (1) | JP4966410B2 (pt) |
BR (1) | BRPI0810414A2 (pt) |
WO (1) | WO2008130231A1 (pt) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011003928B4 (de) | 2011-02-10 | 2012-10-31 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Projektionslithographie |
US9594306B2 (en) * | 2011-03-04 | 2017-03-14 | Asml Netherlands B.V. | Lithographic apparatus, spectral purity filter and device manufacturing method |
DE102015221209A1 (de) | 2015-10-29 | 2017-05-04 | Carl Zeiss Smt Gmbh | Optische Baugruppe mit einem Schutzelement und optische Anordnung damit |
NL2028923B1 (en) * | 2020-09-03 | 2024-02-07 | Asml Netherlands Bv | Pellicle membrane for a lithographic apparatus |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1008352C2 (nl) * | 1998-02-19 | 1999-08-20 | Stichting Tech Wetenschapp | Inrichting, geschikt voor extreem ultraviolet lithografie, omvattende een stralingsbron en een verwerkingsorgaan voor het verwerken van de van de stralingsbron afkomstige straling, alsmede een filter voor het onderdrukken van ongewenste atomaire en microscopische deeltjes welke door een stralingsbron zijn uitgezonden. |
US7006595B2 (en) * | 1998-05-05 | 2006-02-28 | Carl Zeiss Semiconductor Manufacturing Technologies Ag | Illumination system particularly for microlithography |
EP0955641B1 (de) * | 1998-05-05 | 2004-04-28 | Carl Zeiss | Beleuchtungssystem insbesondere für die EUV-Lithographie |
DE10053587A1 (de) * | 2000-10-27 | 2002-05-02 | Zeiss Carl | Beleuchtungssystem mit variabler Einstellung der Ausleuchtung |
US6438199B1 (en) * | 1998-05-05 | 2002-08-20 | Carl-Zeiss-Stiftung | Illumination system particularly for microlithography |
DE19935404A1 (de) * | 1999-07-30 | 2001-02-01 | Zeiss Carl Fa | Beleuchtungssystem mit mehreren Lichtquellen |
US6195201B1 (en) * | 1999-01-27 | 2001-02-27 | Svg Lithography Systems, Inc. | Reflective fly's eye condenser for EUV lithography |
EP1202100A3 (de) * | 2000-10-27 | 2005-04-06 | Carl Zeiss SMT AG | Beleuchtungssystem mit reduzierter Wärmebelastung |
US20020090054A1 (en) * | 2001-01-10 | 2002-07-11 | Michael Sogard | Apparatus and method for containing debris from laser plasma radiation sources |
WO2002059905A2 (de) * | 2001-01-26 | 2002-08-01 | Carl Zeiss Smt Ag | Schmalbandiger spektralfilter und seine verwendung |
TW594847B (en) * | 2001-07-27 | 2004-06-21 | Canon Kk | Illumination system, projection exposure apparatus and method for manufacturing a device provided with a pattern to be exposed |
DE10138284A1 (de) * | 2001-08-10 | 2003-02-27 | Zeiss Carl | Beleuchtungssystem mit genesteten Kollektoren |
US7333178B2 (en) * | 2002-03-18 | 2008-02-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7170587B2 (en) * | 2002-03-18 | 2007-01-30 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
CN1273871C (zh) * | 2002-03-18 | 2006-09-06 | Asml荷兰有限公司 | 光刻装置和器件的制作方法 |
DE60312871T2 (de) * | 2002-08-26 | 2007-12-20 | Carl Zeiss Smt Ag | Gitter basierter spektraler filter zur unterdrückung von strahlung ausserhalb des nutzbandes in einem extrem-ultraviolett lithographiesystem |
DE10317667A1 (de) * | 2003-04-17 | 2004-11-18 | Carl Zeiss Smt Ag | Optisches Element für ein Beleuchtungssystem |
JP2004343082A (ja) * | 2003-04-17 | 2004-12-02 | Asml Netherlands Bv | 凹面および凸面を含む集光器を備えたリトグラフ投影装置 |
US7061591B2 (en) * | 2003-05-30 | 2006-06-13 | Asml Holding N.V. | Maskless lithography systems and methods utilizing spatial light modulator arrays |
JP2006108521A (ja) * | 2004-10-08 | 2006-04-20 | Canon Inc | X線発生装置及び露光装置 |
JP2006128342A (ja) * | 2004-10-28 | 2006-05-18 | Canon Inc | 露光装置、光源装置及びデバイス製造方法 |
US7277158B2 (en) * | 2004-12-02 | 2007-10-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7211810B2 (en) * | 2004-12-29 | 2007-05-01 | Asml Netherlands B.V. | Method for the protection of an optical element, lithographic apparatus, and device manufacturing method |
US7250620B2 (en) * | 2005-01-20 | 2007-07-31 | Infineon Technologies Ag | EUV lithography filter |
US7548302B2 (en) * | 2005-03-29 | 2009-06-16 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20080100816A1 (en) * | 2006-10-31 | 2008-05-01 | Asml Netherlands B.V. | Lithographic apparatus and method |
-
2007
- 2007-04-19 US US11/785,745 patent/US20080259298A1/en not_active Abandoned
-
2008
- 2008-04-18 JP JP2010504004A patent/JP4966410B2/ja not_active Expired - Fee Related
- 2008-04-18 WO PCT/NL2008/050225 patent/WO2008130231A1/en active Application Filing
- 2008-04-18 BR BRPI0810414-0A2A patent/BRPI0810414A2/pt not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
US20080259298A1 (en) | 2008-10-23 |
JP4966410B2 (ja) | 2012-07-04 |
JP2010525570A (ja) | 2010-07-22 |
WO2008130231A1 (en) | 2008-10-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B15K | Others concerning applications: alteration of classification |
Ipc: B29B 11/14 (2006.01), B65D 23/02 (2006.01), B65D 8 |
|
B07A | Application suspended after technical examination (opinion) [chapter 7.1 patent gazette] | ||
B09B | Patent application refused [chapter 9.2 patent gazette] | ||
B12B | Appeal against refusal [chapter 12.2 patent gazette] | ||
B350 | Update of information on the portal [chapter 15.35 patent gazette] |