BR7908672A - Processo de posicao de filmes a partir da fase vapor - Google Patents
Processo de posicao de filmes a partir da fase vaporInfo
- Publication number
- BR7908672A BR7908672A BR7908672A BR7908672A BR7908672A BR 7908672 A BR7908672 A BR 7908672A BR 7908672 A BR7908672 A BR 7908672A BR 7908672 A BR7908672 A BR 7908672A BR 7908672 A BR7908672 A BR 7908672A
- Authority
- BR
- Brazil
- Prior art keywords
- positioning process
- steam phase
- film positioning
- steam
- film
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BR7908672A BR7908672A (pt) | 1979-11-30 | 1979-11-30 | Processo de posicao de filmes a partir da fase vapor |
PCT/BR1980/000013 WO1981001529A1 (en) | 1979-11-30 | 1980-11-26 | Chemical vapour deposition process with lazer heating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BR7908672A BR7908672A (pt) | 1979-11-30 | 1979-11-30 | Processo de posicao de filmes a partir da fase vapor |
Publications (1)
Publication Number | Publication Date |
---|---|
BR7908672A true BR7908672A (pt) | 1981-06-30 |
Family
ID=4018922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR7908672A BR7908672A (pt) | 1979-11-30 | 1979-11-30 | Processo de posicao de filmes a partir da fase vapor |
Country Status (2)
Country | Link |
---|---|
BR (1) | BR7908672A (pt) |
WO (1) | WO1981001529A1 (pt) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5864368A (ja) * | 1981-10-12 | 1983-04-16 | Inoue Japax Res Inc | 化学メツキ方法 |
DE3472574D1 (en) * | 1983-10-14 | 1988-08-11 | Hitachi Ltd | Process for forming an organic thin film |
FR2578095B1 (fr) * | 1985-02-28 | 1988-04-15 | Avitaya Francois D | Procede et dispositif de depot par croissance epitaxiale d'un materiau dope |
US4859496A (en) * | 1986-09-02 | 1989-08-22 | Matsushita Electric Industrial Co., Ltd. | Method of producing an electrically-conductive transparent film |
US4843031A (en) * | 1987-03-17 | 1989-06-27 | Matsushita Electric Industrial Co., Ltd. | Method of fabricating compound semiconductor laser using selective irradiation |
JPH073909B2 (ja) * | 1987-09-08 | 1995-01-18 | 三菱電機株式会社 | 半導体レーザの製造方法 |
US5145714A (en) * | 1990-10-30 | 1992-09-08 | Mcnc | Metal-organic chemical vapor deposition for repairing broken lines in microelectronic packages |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1900116C3 (de) * | 1969-01-02 | 1978-10-19 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen hxxochreiner, aus Silicium bestehender einkristalliner Schichten |
FR2232613A1 (en) * | 1973-06-07 | 1975-01-03 | Poudres & Explosifs Ste Nale | Deposition from vapour phase using laser heating - boron cpds. obtd. on silica, carbon or tungsten substrates |
NL165134B (nl) * | 1974-04-24 | 1980-10-15 | Nippon Telegraph & Telephone | Werkwijze voor de vervaardiging van een staaf als tussenprodukt voor de vervaardiging van een optische vezel en werkwijze voor de vervaardiging van een optische vezel uit zulk een tussenprodukt. |
US4027053A (en) * | 1975-12-19 | 1977-05-31 | Motorola, Inc. | Method of producing polycrystalline silicon ribbon |
US4107349A (en) * | 1977-08-12 | 1978-08-15 | The United States Of America As Represented By The Secretary Of The Army | Method of adjusting the frequency of piezoelectric resonators |
-
1979
- 1979-11-30 BR BR7908672A patent/BR7908672A/pt unknown
-
1980
- 1980-11-26 WO PCT/BR1980/000013 patent/WO1981001529A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
WO1981001529A1 (en) | 1981-06-11 |
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