Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Petkov, Mednikarov, MalinovskifiledCriticalPetkov
Priority to BG7383585ApriorityCriticalpatent/BG41394A1/en
Publication of BG41394A1publicationCriticalpatent/BG41394A1/en
BG7383585A1985-04-041985-04-04Method for vacuum depositing of thin- layer metal coatings for microphotolithography with inorganic resist
BG41394A1
(en)