BG41394A1 - Method for vacuum depositing of thin- layer metal coatings for microphotolithography with inorganic resist - Google Patents

Method for vacuum depositing of thin- layer metal coatings for microphotolithography with inorganic resist

Info

Publication number
BG41394A1
BG41394A1 BG7383585A BG7383585A BG41394A1 BG 41394 A1 BG41394 A1 BG 41394A1 BG 7383585 A BG7383585 A BG 7383585A BG 7383585 A BG7383585 A BG 7383585A BG 41394 A1 BG41394 A1 BG 41394A1
Authority
BG
Bulgaria
Prior art keywords
microphotolithography
thin
layer metal
metal coatings
inorganic resist
Prior art date
Application number
BG7383585A
Inventor
Petkov
Mednikarov
Malinovski
Original Assignee
Petkov
Mednikarov
Malinovski
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Petkov, Mednikarov, Malinovski filed Critical Petkov
Priority to BG7383585A priority Critical patent/BG41394A1/en
Publication of BG41394A1 publication Critical patent/BG41394A1/en

Links

BG7383585A 1985-04-04 1985-04-04 Method for vacuum depositing of thin- layer metal coatings for microphotolithography with inorganic resist BG41394A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
BG7383585A BG41394A1 (en) 1985-04-04 1985-04-04 Method for vacuum depositing of thin- layer metal coatings for microphotolithography with inorganic resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG7383585A BG41394A1 (en) 1985-04-04 1985-04-04 Method for vacuum depositing of thin- layer metal coatings for microphotolithography with inorganic resist

Publications (1)

Publication Number Publication Date
BG41394A1 true BG41394A1 (en) 1987-06-15

Family

ID=3916851

Family Applications (1)

Application Number Title Priority Date Filing Date
BG7383585A BG41394A1 (en) 1985-04-04 1985-04-04 Method for vacuum depositing of thin- layer metal coatings for microphotolithography with inorganic resist

Country Status (1)

Country Link
BG (1) BG41394A1 (en)

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