BG32095A1 - Method for etching of photomaks - Google Patents

Method for etching of photomaks

Info

Publication number
BG32095A1
BG32095A1 BG8150600A BG5060081A BG32095A1 BG 32095 A1 BG32095 A1 BG 32095A1 BG 8150600 A BG8150600 A BG 8150600A BG 5060081 A BG5060081 A BG 5060081A BG 32095 A1 BG32095 A1 BG 32095A1
Authority
BG
Bulgaria
Prior art keywords
photomaks
etching
Prior art date
Application number
BG8150600A
Other languages
Bulgarian (bg)
Inventor
Shpangenberg
Goranchev
Orlinov
Zhelev
Original Assignee
Shpangenberg
Goranchev
Orlinov
Zhelev
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shpangenberg, Goranchev, Orlinov, Zhelev filed Critical Shpangenberg
Priority to BG8150600A priority Critical patent/BG32095A1/en
Publication of BG32095A1 publication Critical patent/BG32095A1/en

Links

BG8150600A 1981-01-30 1981-01-30 Method for etching of photomaks BG32095A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
BG8150600A BG32095A1 (en) 1981-01-30 1981-01-30 Method for etching of photomaks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG8150600A BG32095A1 (en) 1981-01-30 1981-01-30 Method for etching of photomaks

Publications (1)

Publication Number Publication Date
BG32095A1 true BG32095A1 (en) 1982-05-14

Family

ID=3908535

Family Applications (1)

Application Number Title Priority Date Filing Date
BG8150600A BG32095A1 (en) 1981-01-30 1981-01-30 Method for etching of photomaks

Country Status (1)

Country Link
BG (1) BG32095A1 (en)

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