BE880218A - Werkwijze voor de vervaardiging van een halfgeleiderinrichting en daardoor verkregen halfgeleiderinrichting - Google Patents

Werkwijze voor de vervaardiging van een halfgeleiderinrichting en daardoor verkregen halfgeleiderinrichting Download PDF

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Publication number
BE880218A
BE880218A BE2/58227A BE2058227A BE880218A BE 880218 A BE880218 A BE 880218A BE 2/58227 A BE2/58227 A BE 2/58227A BE 2058227 A BE2058227 A BE 2058227A BE 880218 A BE880218 A BE 880218A
Authority
BE
Belgium
Prior art keywords
semiconductor device
manufacturing
therefor
device therefor
emi
Prior art date
Application number
BE2/58227A
Other languages
English (en)
Inventor
W Mattheus
Original Assignee
Bell Telephone Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bell Telephone Mfg filed Critical Bell Telephone Mfg
Priority to BE2/58227A priority Critical patent/BE880218A/nl
Publication of BE880218A publication Critical patent/BE880218A/nl
Priority to EP80107092A priority patent/EP0030286B1/de
Priority to DE8080107092T priority patent/DE3072028D1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/263Bombardment with radiation with high-energy radiation
    • H01L21/268Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Semiconductor Integrated Circuits (AREA)

Description


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Claims (1)

  1. <EMI ID=9.1> <EMI ID=10.1>
BE2/58227A 1979-11-23 1979-11-23 Werkwijze voor de vervaardiging van een halfgeleiderinrichting en daardoor verkregen halfgeleiderinrichting BE880218A (nl)

Priority Applications (3)

Application Number Priority Date Filing Date Title
BE2/58227A BE880218A (nl) 1979-11-23 1979-11-23 Werkwijze voor de vervaardiging van een halfgeleiderinrichting en daardoor verkregen halfgeleiderinrichting
EP80107092A EP0030286B1 (de) 1979-11-23 1980-11-15 Dielektrisch isoliertes Halbleiterbauelement und Verfahren zur Herstellung
DE8080107092T DE3072028D1 (en) 1979-11-23 1980-11-15 Dielectrically insulated semiconductor component and process for its manufacture

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
BE2/58227A BE880218A (nl) 1979-11-23 1979-11-23 Werkwijze voor de vervaardiging van een halfgeleiderinrichting en daardoor verkregen halfgeleiderinrichting
BE880218 1979-11-23

Publications (1)

Publication Number Publication Date
BE880218A true BE880218A (nl) 1980-05-23

Family

ID=25659019

Family Applications (1)

Application Number Title Priority Date Filing Date
BE2/58227A BE880218A (nl) 1979-11-23 1979-11-23 Werkwijze voor de vervaardiging van een halfgeleiderinrichting en daardoor verkregen halfgeleiderinrichting

Country Status (1)

Country Link
BE (1) BE880218A (nl)

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: BELL TELEPHONE MFG CY N.V.

Effective date: 19901130