BE832873A - Procede et appareil de traitement electrolytique par portions discretes de grandes surfaces - Google Patents

Procede et appareil de traitement electrolytique par portions discretes de grandes surfaces

Info

Publication number
BE832873A
BE832873A BE159574A BE159574A BE832873A BE 832873 A BE832873 A BE 832873A BE 159574 A BE159574 A BE 159574A BE 159574 A BE159574 A BE 159574A BE 832873 A BE832873 A BE 832873A
Authority
BE
Belgium
Prior art keywords
electrolytic treatment
large surfaces
discreet portions
discreet
portions
Prior art date
Application number
BE159574A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE832873A publication Critical patent/BE832873A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/04—Tubes; Rings; Hollow bodies
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/16—Polishing
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
BE159574A 1974-09-19 1975-08-28 Procede et appareil de traitement electrolytique par portions discretes de grandes surfaces BE832873A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/507,534 US4001094A (en) 1974-09-19 1974-09-19 Method for incremental electro-processing of large areas

Publications (1)

Publication Number Publication Date
BE832873A true BE832873A (fr) 1975-12-16

Family

ID=24019010

Family Applications (1)

Application Number Title Priority Date Filing Date
BE159574A BE832873A (fr) 1974-09-19 1975-08-28 Procede et appareil de traitement electrolytique par portions discretes de grandes surfaces

Country Status (8)

Country Link
US (2) US4001094A (nl)
JP (1) JPS5939519B2 (nl)
BE (1) BE832873A (nl)
CA (1) CA1051370A (nl)
DE (1) DE2538584C2 (nl)
FR (1) FR2285178A1 (nl)
GB (1) GB1496916A (nl)
NL (1) NL7511011A (nl)

Families Citing this family (95)

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US4127459A (en) * 1977-09-01 1978-11-28 Jumer John F Method and apparatus for incremental electro-polishing
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US4330381A (en) * 1978-09-18 1982-05-18 Jumer John F Method for containerless portable electro-polishing
US4190513A (en) * 1978-09-18 1980-02-26 Jumer John F Apparatus for containerless portable electro-polishing
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DE3345278A1 (de) * 1983-12-14 1985-06-27 Kraftwerk Union AG, 4330 Mülheim Vorrichtung zum elektropolieren der innenoberflaeche von hohlzylindrischen koerpern
FR2561672B1 (fr) * 1984-03-21 1989-09-01 Travaux Milieu Ionisant Dispositif d'electrolyse, utilisable notamment pour la decontamination radioactive de surfaces metalliques
DE3509388C2 (de) * 1985-03-15 1993-12-09 Held Kurt Verfahren und Vorrichtung zur galvanischen Beschichtung von Pressbändern
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US7189318B2 (en) * 1999-04-13 2007-03-13 Semitool, Inc. Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US6368475B1 (en) * 2000-03-21 2002-04-09 Semitool, Inc. Apparatus for electrochemically processing a microelectronic workpiece
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US6991528B2 (en) * 2000-02-17 2006-01-31 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
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US20050092621A1 (en) * 2000-02-17 2005-05-05 Yongqi Hu Composite pad assembly for electrochemical mechanical processing (ECMP)
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US7344432B2 (en) * 2001-04-24 2008-03-18 Applied Materials, Inc. Conductive pad with ion exchange membrane for electrochemical mechanical polishing
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US20050194681A1 (en) * 2002-05-07 2005-09-08 Yongqi Hu Conductive pad with high abrasion
US20040051019A1 (en) * 2002-09-02 2004-03-18 Mogensen Lasse Wesseltoft Apparatus for and a method of adjusting the length of an infusion tube
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US20040108212A1 (en) * 2002-12-06 2004-06-10 Lyndon Graham Apparatus and methods for transferring heat during chemical processing of microelectronic workpieces
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US8795480B2 (en) 2010-07-02 2014-08-05 Novellus Systems, Inc. Control of electrolyte hydrodynamics for efficient mass transfer during electroplating
US9624592B2 (en) 2010-07-02 2017-04-18 Novellus Systems, Inc. Cross flow manifold for electroplating apparatus
US10233556B2 (en) 2010-07-02 2019-03-19 Lam Research Corporation Dynamic modulation of cross flow manifold during electroplating
US10094034B2 (en) 2015-08-28 2018-10-09 Lam Research Corporation Edge flow element for electroplating apparatus
US9523155B2 (en) 2012-12-12 2016-12-20 Novellus Systems, Inc. Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating
US20130248486A1 (en) * 2012-03-23 2013-09-26 Apple Inc. Electron beam polishing of aluminum
US9670588B2 (en) 2013-05-01 2017-06-06 Lam Research Corporation Anisotropic high resistance ionic current source (AHRICS)
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US9816194B2 (en) 2015-03-19 2017-11-14 Lam Research Corporation Control of electrolyte flow dynamics for uniform electroplating
US10014170B2 (en) 2015-05-14 2018-07-03 Lam Research Corporation Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
US10364505B2 (en) 2016-05-24 2019-07-30 Lam Research Corporation Dynamic modulation of cross flow manifold during elecroplating
US11001934B2 (en) 2017-08-21 2021-05-11 Lam Research Corporation Methods and apparatus for flow isolation and focusing during electroplating
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Also Published As

Publication number Publication date
FR2285178B1 (nl) 1979-04-20
GB1496916A (en) 1978-01-05
US4082638A (en) 1978-04-04
CA1051370A (en) 1979-03-27
JPS5154035A (nl) 1976-05-12
NL7511011A (nl) 1976-03-23
DE2538584C2 (de) 1986-09-04
JPS5939519B2 (ja) 1984-09-25
US4001094A (en) 1977-01-04
DE2538584A1 (de) 1976-04-01
FR2285178A1 (fr) 1976-04-16

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: JUMER JOHN F.

Effective date: 19890831