BE818985A - Procede permettant de deposer une couche epitaxiale et dispositif realise par ce procede - Google Patents

Procede permettant de deposer une couche epitaxiale et dispositif realise par ce procede

Info

Publication number
BE818985A
BE818985A BE147732A BE147732A BE818985A BE 818985 A BE818985 A BE 818985A BE 147732 A BE147732 A BE 147732A BE 147732 A BE147732 A BE 147732A BE 818985 A BE818985 A BE 818985A
Authority
BE
Belgium
Prior art keywords
depositing
epitaxial layer
device made
epitaxial
layer
Prior art date
Application number
BE147732A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE818985A publication Critical patent/BE818985A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/12—Liquid-phase epitaxial-layer growth characterised by the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Weting (AREA)
BE147732A 1973-08-21 1974-08-19 Procede permettant de deposer une couche epitaxiale et dispositif realise par ce procede BE818985A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7311470A NL7311470A (nl) 1973-08-21 1973-08-21 Werkwijze voor het neerslaan van een epitaxiale

Publications (1)

Publication Number Publication Date
BE818985A true BE818985A (fr) 1975-02-19

Family

ID=19819436

Family Applications (1)

Application Number Title Priority Date Filing Date
BE147732A BE818985A (fr) 1973-08-21 1974-08-19 Procede permettant de deposer une couche epitaxiale et dispositif realise par ce procede

Country Status (6)

Country Link
JP (1) JPS5051668A (xx)
BE (1) BE818985A (xx)
DE (1) DE2438588A1 (xx)
FR (1) FR2246067A1 (xx)
IT (1) IT1020026B (xx)
NL (1) NL7311470A (xx)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961997A (en) * 1975-05-12 1976-06-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Fabrication of polycrystalline solar cells on low-cost substrates
US4333792A (en) * 1977-01-03 1982-06-08 Massachusetts Institute Of Technology Enhancing epitaxy and preferred orientation
US4174422A (en) * 1977-12-30 1979-11-13 International Business Machines Corporation Growing epitaxial films when the misfit between film and substrate is large
FR2426496A1 (fr) * 1978-05-23 1979-12-21 Massachusetts Inst Technology Procede d'amelioration des caracteristiques epitaxiales et produits obtenus selon le procede
US5122223A (en) * 1979-05-29 1992-06-16 Massachusetts Institute Of Technology Graphoepitaxy using energy beams
US5156995A (en) * 1988-04-01 1992-10-20 Cornell Research Foundation, Inc. Method for reducing or eliminating interface defects in mismatched semiconductor epilayers
JP2642031B2 (ja) * 1992-05-19 1997-08-20 住友電気工業株式会社 化合物半導体の液相エピタキシャル成長方法及び化合物半導体単結晶基板
EP1605498A1 (en) * 2004-06-11 2005-12-14 S.O.I. Tec Silicon on Insulator Technologies S.A. A method of manufacturing a semiconductor wafer

Also Published As

Publication number Publication date
DE2438588A1 (de) 1975-02-27
NL7311470A (nl) 1975-02-25
FR2246067B3 (xx) 1977-06-10
FR2246067A1 (en) 1975-04-25
IT1020026B (it) 1977-12-20
JPS5051668A (xx) 1975-05-08

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