BE812709A - Procede de croissance epitaxiale heterogene - Google Patents

Procede de croissance epitaxiale heterogene

Info

Publication number
BE812709A
BE812709A BE142349A BE142349A BE812709A BE 812709 A BE812709 A BE 812709A BE 142349 A BE142349 A BE 142349A BE 142349 A BE142349 A BE 142349A BE 812709 A BE812709 A BE 812709A
Authority
BE
Belgium
Prior art keywords
epitaxial growth
growth process
heterogeneous epitaxial
heterogeneous
growth
Prior art date
Application number
BE142349A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE812709A publication Critical patent/BE812709A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02543—Phosphides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
BE142349A 1973-03-23 1974-03-22 Procede de croissance epitaxiale heterogene BE812709A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732314672 DE2314672A1 (de) 1973-03-23 1973-03-23 Verfahren zum heteroepitaktischen aufwachsen von iii-v-verbindungs-halbleitermaterial

Publications (1)

Publication Number Publication Date
BE812709A true BE812709A (fr) 1974-07-15

Family

ID=5875750

Family Applications (1)

Application Number Title Priority Date Filing Date
BE142349A BE812709A (fr) 1973-03-23 1974-03-22 Procede de croissance epitaxiale heterogene

Country Status (7)

Country Link
JP (1) JPS49130177A (fr)
BE (1) BE812709A (fr)
DE (1) DE2314672A1 (fr)
FR (1) FR2222135A1 (fr)
IT (1) IT1009348B (fr)
LU (1) LU69679A1 (fr)
NL (1) NL7403943A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE393967B (sv) * 1974-11-29 1977-05-31 Sateko Oy Forfarande och for utforande av stroleggning mellan lagren i ett virkespaket

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123471B1 (fr) * 1969-03-28 1976-07-16

Also Published As

Publication number Publication date
DE2314672A1 (de) 1974-10-03
JPS49130177A (fr) 1974-12-13
FR2222135B1 (fr) 1976-12-17
NL7403943A (fr) 1974-09-25
LU69679A1 (fr) 1974-07-17
FR2222135A1 (en) 1974-10-18
IT1009348B (it) 1976-12-10

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