BE805406A - LIQUID PHASE EPITAXIAL PROCESS, AND DEVICE FOR IMPLEMENTING THIS PROCESS - Google Patents

LIQUID PHASE EPITAXIAL PROCESS, AND DEVICE FOR IMPLEMENTING THIS PROCESS

Info

Publication number
BE805406A
BE805406A BE136122A BE136122A BE805406A BE 805406 A BE805406 A BE 805406A BE 136122 A BE136122 A BE 136122A BE 136122 A BE136122 A BE 136122A BE 805406 A BE805406 A BE 805406A
Authority
BE
Belgium
Prior art keywords
implementing
liquid phase
phase epitaxial
epitaxial process
liquid
Prior art date
Application number
BE136122A
Other languages
French (fr)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722247710 external-priority patent/DE2247710C3/en
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of BE805406A publication Critical patent/BE805406A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/12—Liquid-phase epitaxial-layer growth characterised by the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/10—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/10—Controlling or regulating
    • C30B19/106—Controlling or regulating adding crystallising material or reactants forming it in situ to the liquid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/955—Melt-back

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
BE136122A 1972-09-28 1973-09-27 LIQUID PHASE EPITAXIAL PROCESS, AND DEVICE FOR IMPLEMENTING THIS PROCESS BE805406A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722247710 DE2247710C3 (en) 1972-09-28 Liquid phase epitaxy method and apparatus for carrying it out

Publications (1)

Publication Number Publication Date
BE805406A true BE805406A (en) 1974-03-27

Family

ID=5857691

Family Applications (1)

Application Number Title Priority Date Filing Date
BE136122A BE805406A (en) 1972-09-28 1973-09-27 LIQUID PHASE EPITAXIAL PROCESS, AND DEVICE FOR IMPLEMENTING THIS PROCESS

Country Status (10)

Country Link
US (1) US3880680A (en)
JP (1) JPS5336431B2 (en)
AT (1) AT341579B (en)
BE (1) BE805406A (en)
CA (1) CA1004962A (en)
FR (1) FR2201131B1 (en)
GB (1) GB1433161A (en)
IT (1) IT995486B (en)
LU (1) LU68508A1 (en)
NL (1) NL7313421A (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5080280A (en) * 1973-11-20 1975-06-30
JPS51111476A (en) * 1975-03-26 1976-10-01 Sumitomo Electric Ind Ltd Method of liquid phase epitaxial crystal growth
JPS5222478A (en) * 1975-08-11 1977-02-19 Siemens Ag Liquiddphase epitaxial method
JPS52115783A (en) * 1976-03-24 1977-09-28 Sumitomo Electric Ind Ltd Liquid phase epitaxial growth
US4160682A (en) * 1978-03-30 1979-07-10 Western Electric Co., Inc. Depositing materials on stacked semiconductor wafers
JPS5575998A (en) * 1978-12-04 1980-06-07 Nippon Telegr & Teleph Corp <Ntt> Liquid phase epitaxial growing method
US4235191A (en) * 1979-03-02 1980-11-25 Western Electric Company, Inc. Apparatus for depositing materials on stacked semiconductor wafers
US4597823A (en) * 1983-09-12 1986-07-01 Cook Melvin S Rapid LPE crystal growth
US4594126A (en) * 1983-09-12 1986-06-10 Cook Melvin S Growth of thin epitaxial films on moving substrates from flowing solutions
US5585305A (en) * 1991-08-29 1996-12-17 Shin-Etsu Handotai Co. Ltd. Method for fabricating a semiconductor device
CN1127749C (en) * 1997-10-27 2003-11-12 结晶及技术有限公司 Cathodoluminescent screen with a columnar structure and method for its preparation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3689330A (en) * 1969-04-18 1972-09-05 Sony Corp Method of making a luminescent diode
BE754519A (en) * 1969-08-06 1971-02-08 Motorola Inc METHOD AND APPARATUS FOR THE GROWTH OF EPITAXIAL LAYERS IN LIQUID PHASE ON SEMICONDUCTORS
US3759759A (en) * 1970-01-29 1973-09-18 Fairchild Camera Instr Co Push pull method for solution epitaxial growth of iii v compounds
BE788374A (en) * 1971-12-08 1973-01-02 Rca Corp PROCESS FOR DEPOSITING AN EPITAXIAL LAYER OF A SEMICONDUCTOR MATERIAL ON THE SURFACE OF A SUBSTRATE

Also Published As

Publication number Publication date
GB1433161A (en) 1976-04-22
NL7313421A (en) 1974-04-01
LU68508A1 (en) 1974-04-02
DE2247710B2 (en) 1977-05-05
IT995486B (en) 1975-11-10
FR2201131B1 (en) 1977-03-11
US3880680A (en) 1975-04-29
CA1004962A (en) 1977-02-08
DE2247710A1 (en) 1974-04-11
AT341579B (en) 1978-02-10
FR2201131A1 (en) 1974-04-26
ATA692873A (en) 1977-06-15
JPS4972182A (en) 1974-07-12
JPS5336431B2 (en) 1978-10-03

Similar Documents

Publication Publication Date Title
BE800368A (en) CONTINUOUS PROCESS FOR THE IMPLEMENTATION OF HETEROGENOUS CATALYTIC REACTIONS IN THE LIQUID PHASE
CH556770A (en) PACKAGING PROCESS, ESPECIALLY FOR DRINK CANS, AND DEVICE FOR ITS IMPLEMENTATION.
CH554747A (en) METHOD FOR ADJUSTING THE DIVERGENCE OF DROPS OF A LIQUID CURRENT AND APPARATUS FOR IMPLEMENTING THIS PROCESS.
FR1471859A (en) Method for the continuous casting of a strip, and device for its implementation
BE805406A (en) LIQUID PHASE EPITAXIAL PROCESS, AND DEVICE FOR IMPLEMENTING THIS PROCESS
BE804884A (en) METHOD FOR THE DOSING OF LIQUIDS AND DEVICE FOR THE PRACTICE OF THIS PROCESS
BE812329A (en) METHOD AND DEVICE FOR ULTRASONIC WELDING
BE774492A (en) CONTINUOUS PROCESS FOR THE IMPLEMENTATION OF HETEROGENOUS CATALYTIC REACTIONS IN THE LIQUID PHASE
BE784599A (en) PROCESS AND DEVICE FOR BAGGING
CH558701A (en) PROCEDURE FOR CONTROL OF THE MOVEMENT OF AN ELECTRODE-TOOL, AND DEVICE FOR ITS IMPLEMENTATION.
BE804919A (en) PROCESS FOR TEXTURING WIRE AND DEVICE FOR IMPLEMENTING THIS PROCESS
BE855788A (en) PROCESS FOR LAMINATION WITHOUT STRESS OF MTAUX AND DEVICE FOR IMPLEMENTING THIS PROCESS
BE788318A (en) FILTER FOR CIGARETTE, PROCESS FOR MANUFACTURING THIS FILTER AND DEVICE FOR IMPLEMENTING THIS PROCESS.
CH503513A (en) Process for mixing a liquid and device for carrying out this process
CH551798A (en) CRYSTALLIZATION PROCESS AND APPARATUS FOR IMPLEMENTING THIS PROCESS.
FR94365E (en) Process for the continuous sterilization of a liquid and device for carrying out this process.
CH543217A (en) Process for the continuous deselectrisation of non-textile insulating materials, and device for implementing this process
BE749130A (en) METHOD AND DEVICE FOR COOLING CALCIUM CARBIDE FLOWED INTO CONTAINERS
BE776386A (en) CONTINUOUS PROCESS FOR THE CONTINUOUS MANUFACTURING OF FREET SEALED TUBES AND DEVICE FOR IMPLEMENTING THIS PROCESS
CH549964A (en) CIGARETTE FILTER FILLING PROCESS AND DEVICE FOR IMPLEMENTING THE PROCESS.
FR1421104A (en) Process for the continuous sterilization of a liquid and device for carrying out this process
CH457373A (en) Method for forming single crystals and device for implementing this method
BE757738A (en) PROCESS FOR THE MANUFACTURING OF STORAGE BAGS AND DEVICE FOR IMPLEMENTING THIS PROCESS.
BE752358A (en) DEVICE FOR BOTTLING LIQUIDS
BE806936A (en) ONE-PASS PROCESS FOR SOWING WITHOUT GRILL AND DEVICE FOR IMPLEMENTING THIS PROCESS