BE801614A - Materiau en couches minces constitue par un alliage de silicium et di taniali obtenu par pulverisation destine notamment a la realisation d'un composant electrique - Google Patents

Materiau en couches minces constitue par un alliage de silicium et di taniali obtenu par pulverisation destine notamment a la realisation d'un composant electrique

Info

Publication number
BE801614A
BE801614A BE132862A BE132862A BE801614A BE 801614 A BE801614 A BE 801614A BE 132862 A BE132862 A BE 132862A BE 132862 A BE132862 A BE 132862A BE 801614 A BE801614 A BE 801614A
Authority
BE
Belgium
Prior art keywords
taniali
realization
spraying
alloy
silicon
Prior art date
Application number
BE132862A
Other languages
English (en)
French (fr)
Inventor
F G Peters
N Schwartz
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of BE801614A publication Critical patent/BE801614A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
BE132862A 1972-07-03 1973-06-28 Materiau en couches minces constitue par un alliage de silicium et di taniali obtenu par pulverisation destine notamment a la realisation d'un composant electrique BE801614A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26858872A 1972-07-03 1972-07-03

Publications (1)

Publication Number Publication Date
BE801614A true BE801614A (fr) 1973-10-15

Family

ID=23023639

Family Applications (1)

Application Number Title Priority Date Filing Date
BE132862A BE801614A (fr) 1972-07-03 1973-06-28 Materiau en couches minces constitue par un alliage de silicium et di taniali obtenu par pulverisation destine notamment a la realisation d'un composant electrique

Country Status (5)

Country Link
US (1) US3786323A (de)
BE (1) BE801614A (de)
DE (1) DE2333167A1 (de)
FR (1) FR2191401A1 (de)
NL (1) NL7308955A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2513859C2 (de) * 1975-03-27 1981-11-12 Siemens AG, 1000 Berlin und 8000 München Verfahren zum Herstellen eines Kondensator-Widerstands-Netzwerks
JPS59179152A (ja) * 1983-03-31 1984-10-11 Agency Of Ind Science & Technol アモルファスシリコン半導体薄膜の製造方法
US4464701A (en) * 1983-08-29 1984-08-07 International Business Machines Corporation Process for making high dielectric constant nitride based materials and devices using the same
US6454994B1 (en) 2000-08-28 2002-09-24 Honeywell International Inc. Solids comprising tantalum, strontium and silicon
EP2123789A1 (de) * 2008-05-15 2009-11-25 Eifeler Werkzeuge GmbH Verfahren zur Herstellung von Hartbeschichtungen

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR96207E (fr) * 1968-02-08 1972-05-19 Western Electric Co Condensateur en couches minces.

Also Published As

Publication number Publication date
FR2191401A1 (de) 1974-02-01
US3786323A (en) 1974-01-15
DE2333167A1 (de) 1974-01-17
NL7308955A (de) 1974-01-07

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