BE795278A - METHOD FOR THE MEASUREMENT, BY IONIZATION, OF THE FLOW OF THE VAPOR EMITTED DURING A VACUUM EVAPORATION AND GAUGE APPLYING THIS PROCESS - Google Patents

METHOD FOR THE MEASUREMENT, BY IONIZATION, OF THE FLOW OF THE VAPOR EMITTED DURING A VACUUM EVAPORATION AND GAUGE APPLYING THIS PROCESS

Info

Publication number
BE795278A
BE795278A BE795278DA BE795278A BE 795278 A BE795278 A BE 795278A BE 795278D A BE795278D A BE 795278DA BE 795278 A BE795278 A BE 795278A
Authority
BE
Belgium
Prior art keywords
ionization
measurement
flow
vacuum evaporation
emitted during
Prior art date
Application number
Other languages
French (fr)
Inventor
P Genequand
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE795278A publication Critical patent/BE795278A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
    • G01F1/64—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Measurement Of Radiation (AREA)
  • Physical Vapour Deposition (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
BE795278D 1972-02-09 METHOD FOR THE MEASUREMENT, BY IONIZATION, OF THE FLOW OF THE VAPOR EMITTED DURING A VACUUM EVAPORATION AND GAUGE APPLYING THIS PROCESS BE795278A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH191872A CH570610A5 (en) 1972-02-09 1972-02-09

Publications (1)

Publication Number Publication Date
BE795278A true BE795278A (en) 1973-08-09

Family

ID=4221617

Family Applications (1)

Application Number Title Priority Date Filing Date
BE795278D BE795278A (en) 1972-02-09 METHOD FOR THE MEASUREMENT, BY IONIZATION, OF THE FLOW OF THE VAPOR EMITTED DURING A VACUUM EVAPORATION AND GAUGE APPLYING THIS PROCESS

Country Status (12)

Country Link
US (1) US3842267A (en)
JP (1) JPS4889794A (en)
BE (1) BE795278A (en)
CA (1) CA983581A (en)
CH (1) CH570610A5 (en)
DE (1) DE2305102A1 (en)
FR (1) FR2171824A5 (en)
GB (1) GB1394155A (en)
IE (1) IE37274B1 (en)
IT (1) IT992543B (en)
LU (1) LU66996A1 (en)
NL (1) NL7301762A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024399A (en) * 1975-01-06 1977-05-17 Jersey Nuclear-Avco Isotopes, Inc. Method and apparatus for measuring vapor flow in isotope separation
US4010366A (en) * 1975-09-22 1977-03-01 Xerox Corporation Measurement of the mass and charge of charged particles
JPS6311808A (en) * 1986-07-02 1988-01-19 Mitsubishi Electric Corp Film thickness monitor
TW222650B (en) * 1991-04-01 1994-04-21 Dow Corning

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2694151A (en) * 1953-06-26 1954-11-09 Cons Eng Corp Mass spectrometry
US2967239A (en) * 1954-02-19 1961-01-03 Gen Electric Method and apparatus for analyzing constituents of a substance
US2958774A (en) * 1957-05-07 1960-11-01 Ca Nat Research Council Omegatron with orbit increment detection
NL109528C (en) * 1958-03-15
US3247373A (en) * 1962-12-18 1966-04-19 Gca Corp Mass spectrometer leak detector with means for controlling the ion source output

Also Published As

Publication number Publication date
IE37274L (en) 1973-08-09
IE37274B1 (en) 1977-06-22
DE2305102A1 (en) 1973-08-16
IT992543B (en) 1975-09-30
CH570610A5 (en) 1975-12-15
FR2171824A5 (en) 1973-09-21
CA983581A (en) 1976-02-10
LU66996A1 (en) 1973-04-19
GB1394155A (en) 1975-05-14
NL7301762A (en) 1973-08-13
JPS4889794A (en) 1973-11-22
US3842267A (en) 1974-10-15

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