BE774209A - METHOD AND APPARATUS FOR POLISHING THIN ELEMENTS - Google Patents

METHOD AND APPARATUS FOR POLISHING THIN ELEMENTS

Info

Publication number
BE774209A
BE774209A BE774209A BE774209A BE774209A BE 774209 A BE774209 A BE 774209A BE 774209 A BE774209 A BE 774209A BE 774209 A BE774209 A BE 774209A BE 774209 A BE774209 A BE 774209A
Authority
BE
Belgium
Prior art keywords
thin elements
polishing thin
polishing
elements
thin
Prior art date
Application number
BE774209A
Other languages
French (fr)
Inventor
R J Walsh
Original Assignee
Monsanto Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Monsanto Co filed Critical Monsanto Co
Publication of BE774209A publication Critical patent/BE774209A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02024—Mirror polishing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
BE774209A 1970-10-21 1971-10-20 METHOD AND APPARATUS FOR POLISHING THIN ELEMENTS BE774209A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8267370A 1970-10-21 1970-10-21

Publications (1)

Publication Number Publication Date
BE774209A true BE774209A (en) 1972-04-20

Family

ID=22172673

Family Applications (1)

Application Number Title Priority Date Filing Date
BE774209A BE774209A (en) 1970-10-21 1971-10-20 METHOD AND APPARATUS FOR POLISHING THIN ELEMENTS

Country Status (5)

Country Link
JP (1) JPS545160B1 (en)
BE (1) BE774209A (en)
DE (1) DE2152318A1 (en)
GB (1) GB1319882A (en)
NL (1) NL7114274A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531582A (en) * 1978-08-15 1980-03-05 Ibm Free polishing device
JPS57149373U (en) * 1981-03-16 1982-09-20
JPS5871593U (en) * 1981-11-04 1983-05-14 三菱重工業株式会社 water cooled heat exchanger
US4811522A (en) * 1987-03-23 1989-03-14 Gill Jr Gerald L Counterbalanced polishing apparatus
US5104828A (en) * 1990-03-01 1992-04-14 Intel Corporation Method of planarizing a dielectric formed over a semiconductor substrate
GB2299895B (en) * 1992-05-26 1997-01-08 Toshiba Kk polishing apparatus for planarizing layer on a semiconductor wafer
JP2914166B2 (en) * 1994-03-16 1999-06-28 日本電気株式会社 Polishing cloth surface treatment method and polishing apparatus
GB9512262D0 (en) 1995-06-16 1995-08-16 Bingham Richard G Tool for computer-controlled machine for optical polishing and figuring

Also Published As

Publication number Publication date
DE2152318A1 (en) 1972-04-27
JPS545160B1 (en) 1979-03-14
NL7114274A (en) 1972-04-25
GB1319882A (en) 1973-06-13

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