BE767412A - Polymeres sensibles aux irridiations et leurs utilisations - Google Patents

Polymeres sensibles aux irridiations et leurs utilisations

Info

Publication number
BE767412A
BE767412A BE767412A BE767412A BE767412A BE 767412 A BE767412 A BE 767412A BE 767412 A BE767412 A BE 767412A BE 767412 A BE767412 A BE 767412A BE 767412 A BE767412 A BE 767412A
Authority
BE
Belgium
Prior art keywords
irridiation
polymers sensitive
polymers
sensitive
Prior art date
Application number
BE767412A
Other languages
English (en)
French (fr)
Inventor
A A R Sayigh
F A Stuber
H Ulrich
Original Assignee
Upjohn Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Upjohn Co filed Critical Upjohn Co
Publication of BE767412A publication Critical patent/BE767412A/xx

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00Chemical modification by after-treatment
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00Chemical modification by after-treatment
    • C08F8/34Introducing sulfur atoms or sulfur-containing groups
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54Absorbers, e.g. of opaque materials
    • G03F1/56Organic absorbers, e.g. of photo-resists
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/008Azides
    • G03F7/012Macromolecular azides; Macromolecular additives, e.g. binders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
BE767412A 1970-05-20 1971-05-19 Polymeres sensibles aux irridiations et leurs utilisations BE767412A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US3917870A 1970-05-20 1970-05-20
US9344570A 1970-11-27 1970-11-27

Publications (1)

Publication Number Publication Date
BE767412A true BE767412A (fr) 1971-11-19

Family

ID=26715885

Family Applications (1)

Application Number Title Priority Date Filing Date
BE767412A BE767412A (fr) 1970-05-20 1971-05-19 Polymeres sensibles aux irridiations et leurs utilisations

Country Status (6)

Country Link
BE (1) BE767412A (enrdf_load_stackoverflow)
CA (1) CA972097A (enrdf_load_stackoverflow)
CH (3) CH579290A (enrdf_load_stackoverflow)
DE (1) DE2123623A1 (enrdf_load_stackoverflow)
FR (1) FR2091827A5 (enrdf_load_stackoverflow)
GB (1) GB1331852A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
FR2091827A5 (enrdf_load_stackoverflow) 1972-01-14
CH732171A4 (enrdf_load_stackoverflow) 1976-02-27
CH583753A5 (enrdf_load_stackoverflow) 1977-01-14
DE2123623A1 (de) 1971-12-02
CA972097A (en) 1975-07-29
CH579290A (enrdf_load_stackoverflow) 1976-08-31
GB1331852A (en) 1973-09-26

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