BE758258A - Procede de depot d'aluminium - Google Patents
Procede de depot d'aluminiumInfo
- Publication number
- BE758258A BE758258A BE758258DA BE758258A BE 758258 A BE758258 A BE 758258A BE 758258D A BE758258D A BE 758258DA BE 758258 A BE758258 A BE 758258A
- Authority
- BE
- Belgium
- Prior art keywords
- deposit process
- aluminum deposit
- aluminum
- deposit
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemically Coating (AREA)
- Chemical Treatment Of Metals (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP44087965A JPS4819057B1 (xx) | 1969-11-01 | 1969-11-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE758258A true BE758258A (fr) | 1971-04-01 |
Family
ID=13929553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE758258D BE758258A (fr) | 1969-11-01 | Procede de depot d'aluminium |
Country Status (8)
Country | Link |
---|---|
US (1) | US3753768A (xx) |
JP (1) | JPS4819057B1 (xx) |
BE (1) | BE758258A (xx) |
CA (1) | CA944634A (xx) |
FR (1) | FR2066672A5 (xx) |
GB (1) | GB1320383A (xx) |
NL (1) | NL143625B (xx) |
SE (1) | SE363356B (xx) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4433012A (en) * | 1980-07-10 | 1984-02-21 | Itt Industries, Inc. | Process for the pyrolytic deposition of aluminum from TIBA |
US4460618A (en) * | 1978-05-25 | 1984-07-17 | Itt Industries, Inc. | Aluminum deposition on semiconductor bodies |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4183781A (en) * | 1978-09-25 | 1980-01-15 | International Business Machines Corporation | Stabilization process for aluminum microcircuits which have been reactive-ion etched |
US4332879A (en) * | 1978-12-01 | 1982-06-01 | Hughes Aircraft Company | Process for depositing a film of controlled composition using a metallo-organic photoresist |
US5273775A (en) * | 1990-09-12 | 1993-12-28 | Air Products And Chemicals, Inc. | Process for selectively depositing copper aluminum alloy onto a substrate |
US7358674B2 (en) * | 2004-07-27 | 2008-04-15 | General Electric Company | Structure having electrodes with metal core and coating |
US7913644B2 (en) * | 2005-09-30 | 2011-03-29 | Lam Research Corporation | Electroless deposition system |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2443196A (en) * | 1944-06-16 | 1948-06-15 | Raines Arnold | Process for making front-surface mirrors |
US2643959A (en) * | 1950-05-29 | 1953-06-30 | Manufacturers Chemical Corp | Process for the protective treatment of iron |
US2887984A (en) * | 1954-06-24 | 1959-05-26 | Ohio Commw Eng Co | Apparatus for gas plating continuous length of metal strip |
US2843506A (en) * | 1955-07-13 | 1958-07-15 | Ohio Commw Eng Co | Process of gas plating an article with light metal |
US2880115A (en) * | 1955-07-13 | 1959-03-31 | Ohio Commw Eng Co | Method of gas plating light metals |
GB956990A (en) * | 1960-10-29 | 1964-04-29 | Sumitomo Chemical Co | A method for manufacturing aluminum |
US3535108A (en) * | 1969-09-22 | 1970-10-20 | Ethyl Corp | Process for producing aluminum |
-
0
- BE BE758258D patent/BE758258A/xx unknown
-
1969
- 1969-11-01 JP JP44087965A patent/JPS4819057B1/ja active Pending
-
1970
- 1970-10-28 FR FR7038912A patent/FR2066672A5/fr not_active Expired
- 1970-10-28 GB GB5128170A patent/GB1320383A/en not_active Expired
- 1970-10-29 NL NL707015888A patent/NL143625B/xx unknown
- 1970-10-30 SE SE14702/70A patent/SE363356B/xx unknown
- 1970-10-30 CA CA096,976A patent/CA944634A/en not_active Expired
- 1970-10-30 US US00085823A patent/US3753768A/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4460618A (en) * | 1978-05-25 | 1984-07-17 | Itt Industries, Inc. | Aluminum deposition on semiconductor bodies |
US4433012A (en) * | 1980-07-10 | 1984-02-21 | Itt Industries, Inc. | Process for the pyrolytic deposition of aluminum from TIBA |
Also Published As
Publication number | Publication date |
---|---|
DE2053407A1 (de) | 1971-05-27 |
DE2053407B2 (de) | 1974-10-03 |
CA944634A (en) | 1974-04-02 |
FR2066672A5 (xx) | 1971-08-06 |
NL143625B (nl) | 1974-10-15 |
GB1320383A (en) | 1973-06-13 |
NL7015888A (xx) | 1971-05-04 |
SE363356B (xx) | 1974-01-14 |
US3753768A (en) | 1973-08-21 |
JPS4819057B1 (xx) | 1973-06-11 |
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