BE738452A - - Google Patents
Info
- Publication number
- BE738452A BE738452A BE738452DA BE738452A BE 738452 A BE738452 A BE 738452A BE 738452D A BE738452D A BE 738452DA BE 738452 A BE738452 A BE 738452A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Discharge Heating (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19681790132 DE1790132C3 (de) | 1968-09-16 | 1968-09-16 | Glimmentladungsgerät |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE738452A true BE738452A (xx) | 1970-02-16 |
Family
ID=5706900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE738452D BE738452A (xx) | 1968-09-16 | 1969-09-05 |
Country Status (6)
| Country | Link |
|---|---|
| BE (1) | BE738452A (xx) |
| DE (1) | DE1790132C3 (xx) |
| FR (1) | FR2018208A1 (xx) |
| GB (1) | GB1222917A (xx) |
| LU (1) | LU59324A1 (xx) |
| NL (1) | NL6913857A (xx) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114164410B (zh) * | 2021-12-15 | 2022-09-30 | 上海交通大学 | 一种源极与待表面合金化处理的工件距离调整方法和装置 |
-
1968
- 1968-09-16 DE DE19681790132 patent/DE1790132C3/de not_active Expired
-
1969
- 1969-08-20 GB GB4154669A patent/GB1222917A/en not_active Expired
- 1969-08-21 LU LU59324D patent/LU59324A1/xx unknown
- 1969-09-05 BE BE738452D patent/BE738452A/xx unknown
- 1969-09-11 NL NL6913857A patent/NL6913857A/xx unknown
- 1969-09-16 FR FR6931477A patent/FR2018208A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE1790132A1 (de) | 1972-01-05 |
| LU59324A1 (xx) | 1970-01-06 |
| FR2018208A1 (xx) | 1970-05-29 |
| DE1790132C3 (de) | 1978-05-03 |
| DE1790132B2 (de) | 1977-09-08 |
| GB1222917A (en) | 1971-02-17 |
| NL6913857A (xx) | 1970-03-18 |