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H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32055—Arc discharge
H—ELECTRICITY
H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
H05H1/00—Generating plasma; Handling plasma
H05H1/24—Generating plasma
H05H1/26—Plasma torches
H05H1/32—Plasma torches using an arc
H—ELECTRICITY
H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
H05H1/00—Generating plasma; Handling plasma
H05H1/24—Generating plasma
H05H1/26—Plasma torches
H05H1/32—Plasma torches using an arc
H05H1/34—Details, e.g. electrodes, nozzles
H05H1/3421—Transferred arc or pilot arc mode
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