BE713067A - - Google Patents
Info
- Publication number
- BE713067A BE713067A BE713067DA BE713067A BE 713067 A BE713067 A BE 713067A BE 713067D A BE713067D A BE 713067DA BE 713067 A BE713067 A BE 713067A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
- C04B35/521—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite obtained by impregnation of carbon products with a carbonisable material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US63182067A | 1967-04-18 | 1967-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE713067A true BE713067A (forum.php) | 1968-08-16 |
Family
ID=24532889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE713067D BE713067A (forum.php) | 1967-04-18 | 1968-04-01 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3549847A (forum.php) |
| BE (1) | BE713067A (forum.php) |
| DE (1) | DE1771169A1 (forum.php) |
| FR (1) | FR1562474A (forum.php) |
| GB (1) | GB1221852A (forum.php) |
| NL (1) | NL6805349A (forum.php) |
| SE (1) | SE353005B (forum.php) |
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1932567C3 (de) * | 1969-06-27 | 1975-06-26 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Verfahren zur Herstellung von Brenn- und/oder Brutelementen für Kernreaktoren |
| US3636923A (en) * | 1970-03-04 | 1972-01-25 | Atomic Energy Commission | Apparatus for coating microspheres with pyrolytic carbon |
| US3845738A (en) * | 1973-09-12 | 1974-11-05 | Rca Corp | Vapor deposition apparatus with pyrolytic graphite heat shield |
| GB1490347A (en) * | 1974-02-08 | 1977-11-02 | Dunlop Ltd | Friction members |
| US3980854A (en) * | 1974-11-15 | 1976-09-14 | Rca Corporation | Graphite susceptor structure for inductively heating semiconductor wafers |
| US4089176A (en) * | 1976-01-20 | 1978-05-16 | The Garrett Corporation | Heat storage method and apparatus |
| CA1101164A (en) * | 1977-04-30 | 1981-05-19 | Sumitomo Electric Industries, Ltd. | Method and apparatus for producing fibers for optical transmission |
| US4241104A (en) * | 1978-10-16 | 1980-12-23 | The Fluorocarbon Company | Process for bonding carbon substrates using particles of a thermally stable solid |
| US4168998A (en) * | 1978-12-06 | 1979-09-25 | Mitsubishi Monsanto Chemical Co. | Process for manufacturing a vapor phase epitaxial wafer of compound semiconductor without causing breaking of wafer by utilizing a pre-coating of carbonaceous powder |
| US4251206A (en) * | 1979-05-14 | 1981-02-17 | Rca Corporation | Apparatus for and method of supporting a crucible for EFG growth of sapphire |
| DE2949476A1 (de) * | 1979-12-08 | 1981-06-11 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zur herstellung von kuevetten fuer die flammenlose atom-absorptions-spektroskopie |
| US4339645A (en) * | 1980-07-03 | 1982-07-13 | Rca Corporation | RF Heating coil construction for stack of susceptors |
| US4442165A (en) * | 1981-03-26 | 1984-04-10 | General Electric Co. | Low-density thermally insulating carbon-carbon syntactic foam composite |
| FR2516914B1 (fr) * | 1981-11-26 | 1986-03-14 | Commissariat Energie Atomique | Procede de densification d'une structure poreuse |
| DE8413711U1 (de) * | 1984-05-05 | 1985-08-29 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Probenträger für die flammenlose Atomabsorptions- und -emissionsspektroskopie |
| US4640223A (en) * | 1984-07-24 | 1987-02-03 | Dozier Alfred R | Chemical vapor deposition reactor |
| DE3678030D1 (de) * | 1985-03-20 | 1991-04-18 | Sharp Kk | Herstellung von kohlenstoffschichten. |
| US5273778A (en) * | 1985-03-20 | 1993-12-28 | Sharp Kabushiki Kaisha | Method for producing graphite intercalation compound |
| US5238705A (en) * | 1987-02-24 | 1993-08-24 | Semiconductor Energy Laboratory Co., Ltd. | Carbonaceous protective films and method of depositing the same |
| US4761308A (en) * | 1987-06-22 | 1988-08-02 | General Electric Company | Process for the preparation of reflective pyrolytic graphite |
| DE4020723C2 (de) * | 1990-06-29 | 1999-10-21 | Finckh Maschf | Schüttelwalze für das Langsieb von Langsieb-Papiermaschinen |
| US5198263A (en) * | 1991-03-15 | 1993-03-30 | The United States Of America As Represented By The United States Department Of Energy | High rate chemical vapor deposition of carbon films using fluorinated gases |
| US5645744A (en) * | 1991-04-05 | 1997-07-08 | The Boeing Company | Retort for achieving thermal uniformity in induction processing of organic matrix composites or metals |
| US5808281A (en) * | 1991-04-05 | 1998-09-15 | The Boeing Company | Multilayer susceptors for achieving thermal uniformity in induction processing of organic matrix composites or metals |
| US5728309A (en) * | 1991-04-05 | 1998-03-17 | The Boeing Company | Method for achieving thermal uniformity in induction processing of organic matrix composites or metals |
| JPH07176482A (ja) * | 1991-05-31 | 1995-07-14 | At & T Corp | エピタキシャル成長方法および装置 |
| CA2185438C (en) * | 1994-03-16 | 2004-02-10 | Robert Lloyd | Apparatus for eddy current heating, heat storage, electricity generation, and lens moulding process |
| US6086680A (en) * | 1995-08-22 | 2000-07-11 | Asm America, Inc. | Low-mass susceptor |
| GB9612882D0 (en) | 1996-06-20 | 1996-08-21 | Dunlop Ltd | Densification of a porous structure |
| EP1036406B1 (en) | 1997-11-03 | 2003-04-02 | ASM America, Inc. | Improved low mass wafer support system |
| US6623563B2 (en) | 2001-01-02 | 2003-09-23 | Applied Materials, Inc. | Susceptor with bi-metal effect |
| US6554907B2 (en) * | 2001-01-02 | 2003-04-29 | Applied Materials, Inc. | Susceptor with internal support |
| US20050170314A1 (en) * | 2002-11-27 | 2005-08-04 | Richard Golden | Dental pliers design with offsetting jaw and pad elements for assisting in removing upper and lower teeth and method for removing teeth utilizing the dental plier design |
| DE102004060625A1 (de) * | 2004-12-16 | 2006-06-29 | Siltronic Ag | Beschichtete Halbleiterscheibe und Verfahren und Vorrichtung zur Herstellung der Halbleiterscheibe |
| US7285483B2 (en) * | 2003-06-26 | 2007-10-23 | Silitronic Ag | Coated semiconductor wafer, and process and apparatus for producing the semiconductor wafer |
| US7235139B2 (en) * | 2003-10-28 | 2007-06-26 | Veeco Instruments Inc. | Wafer carrier for growing GaN wafers |
| JP4350695B2 (ja) * | 2004-12-01 | 2009-10-21 | 株式会社フューチャービジョン | 処理装置 |
| JP5051875B2 (ja) * | 2006-12-25 | 2012-10-17 | 東京エレクトロン株式会社 | 成膜装置および成膜方法 |
| US7921803B2 (en) * | 2007-09-21 | 2011-04-12 | Applied Materials, Inc. | Chamber components with increased pyrometry visibility |
| US8801857B2 (en) * | 2008-10-31 | 2014-08-12 | Asm America, Inc. | Self-centering susceptor ring assembly |
| RU2398738C1 (ru) * | 2009-02-26 | 2010-09-10 | Институт новых углеродных материалов и технологий (Закрытое акционерное общество) (ИНУМиТ (ЗАО)) | Высокотемпературный углеграфитовый теплоизоляционный материал и способ его получения |
| CA2880824C (en) | 2012-07-02 | 2019-08-13 | Zimmer, Inc. | Thin film tantalum coating for medical implants |
| TWI664918B (zh) * | 2014-05-21 | 2019-07-11 | 瑞士商菲利浦莫里斯製品股份有限公司 | 可感應加熱的菸草產品 |
| US10407769B2 (en) | 2016-03-18 | 2019-09-10 | Goodrich Corporation | Method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces |
| USD914620S1 (en) | 2019-01-17 | 2021-03-30 | Asm Ip Holding B.V. | Vented susceptor |
| TWI839443B (zh) | 2019-01-17 | 2024-04-21 | 荷蘭商 Ａｓｍ Ｉｐ 私人控股有限公司 | 通風基座 |
| USD920936S1 (en) | 2019-01-17 | 2021-06-01 | Asm Ip Holding B.V. | Higher temperature vented susceptor |
| TWI845682B (zh) | 2019-05-22 | 2024-06-21 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | 工件基座主體 |
| US11764101B2 (en) | 2019-10-24 | 2023-09-19 | ASM IP Holding, B.V. | Susceptor for semiconductor substrate processing |
| USD1031676S1 (en) | 2020-12-04 | 2024-06-18 | Asm Ip Holding B.V. | Combined susceptor, support, and lift system |
-
1967
- 1967-04-18 US US631820A patent/US3549847A/en not_active Expired - Lifetime
-
1968
- 1968-04-01 BE BE713067D patent/BE713067A/xx unknown
- 1968-04-08 GB GB06846/68A patent/GB1221852A/en not_active Expired
- 1968-04-10 SE SE04933/68A patent/SE353005B/xx unknown
- 1968-04-13 DE DE19681771169 patent/DE1771169A1/de active Pending
- 1968-04-16 NL NL6805349A patent/NL6805349A/xx unknown
- 1968-04-17 FR FR1562474D patent/FR1562474A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| SE353005B (forum.php) | 1973-01-15 |
| FR1562474A (forum.php) | 1969-04-04 |
| DE1771169A1 (de) | 1972-02-17 |
| US3549847A (en) | 1970-12-22 |
| GB1221852A (en) | 1971-02-10 |
| NL6805349A (forum.php) | 1968-10-21 |