BE688340A - - Google Patents

Info

Publication number
BE688340A
BE688340A BE688340DA BE688340A BE 688340 A BE688340 A BE 688340A BE 688340D A BE688340D A BE 688340DA BE 688340 A BE688340 A BE 688340A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE688340A publication Critical patent/BE688340A/xx

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/46Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
BE688340D 1965-12-22 1966-10-17 BE688340A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEJ29683A DE1261608B (en) 1965-12-22 1965-12-22 High frequency plasma generator

Publications (1)

Publication Number Publication Date
BE688340A true BE688340A (en) 1967-03-31

Family

ID=7203674

Family Applications (1)

Application Number Title Priority Date Filing Date
BE688340D BE688340A (en) 1965-12-22 1966-10-17

Country Status (5)

Country Link
BE (1) BE688340A (en)
DE (1) DE1261608B (en)
FR (1) FR1499554A (en)
LU (1) LU52055A1 (en)
NL (1) NL6615531A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2715019A1 (en) * 1994-01-13 1995-07-13 Plasmion Plasma formation device using micro-wave excitation to produce ion beam

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1256686A (en) * 1969-08-22 1971-12-15
BE758571A (en) * 1969-11-06 1971-04-16 Euratom HIGH FREQUENCY PLASMA GENERATOR
CA1159012A (en) * 1980-05-02 1983-12-20 Seitaro Matsuo Plasma deposition apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2715019A1 (en) * 1994-01-13 1995-07-13 Plasmion Plasma formation device using micro-wave excitation to produce ion beam

Also Published As

Publication number Publication date
FR1499554A (en) 1967-10-27
DE1261608B (en) 1968-02-22
LU52055A1 (en) 1966-11-28
NL6615531A (en) 1967-06-23

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