BE687030A - - Google Patents

Info

Publication number
BE687030A
BE687030A BE687030DA BE687030A BE 687030 A BE687030 A BE 687030A BE 687030D A BE687030D A BE 687030DA BE 687030 A BE687030 A BE 687030A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE687030A publication Critical patent/BE687030A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE687030D 1965-09-20 1966-09-16 BE687030A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US488671A US3390249A (en) 1965-09-20 1965-09-20 Vaporization monitoring apparatus

Publications (1)

Publication Number Publication Date
BE687030A true BE687030A (enrdf_load_stackoverflow) 1967-03-16

Family

ID=23940651

Family Applications (1)

Application Number Title Priority Date Filing Date
BE687030D BE687030A (enrdf_load_stackoverflow) 1965-09-20 1966-09-16

Country Status (4)

Country Link
US (1) US3390249A (enrdf_load_stackoverflow)
BE (1) BE687030A (enrdf_load_stackoverflow)
DE (1) DE1521363B2 (enrdf_load_stackoverflow)
GB (1) GB1154237A (enrdf_load_stackoverflow)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3432335A (en) * 1966-03-15 1969-03-11 Lokomotivbau Elektrotech Cyclically moving electron beam for uniform vapor deposited coating
US3446934A (en) * 1968-01-30 1969-05-27 Air Reduction Electron beam heating apparatus
US3607222A (en) * 1968-11-26 1971-09-21 Air Reduction Method for evaporating alloy
US3592955A (en) * 1969-09-24 1971-07-13 Air Reduction Electron beam furnace
US3622679A (en) * 1970-09-29 1971-11-23 Air Reduction Heating system for electron beam furnace
CH566399A5 (enrdf_load_stackoverflow) * 1973-05-26 1975-09-15 Balzers Patent Beteilig Ag
US4024399A (en) * 1975-01-06 1977-05-17 Jersey Nuclear-Avco Isotopes, Inc. Method and apparatus for measuring vapor flow in isotope separation
DE3050343C2 (de) * 1980-04-25 1985-06-27 Stanislav Petrovič Dmitriev Einrichtung zur Elektronenbestrahlung von Objekten
US4429401A (en) 1981-12-04 1984-01-31 Jersey Nuclear-Avco Isotopes, Inc. Molten-metal liquid level sensor
DE3639683A1 (de) * 1986-11-20 1988-05-26 Leybold Ag Verdampferanordnung mit einem rechteckigen verdampfertiegel und mehreren elektronenkanonen
FR2634061B1 (fr) * 1988-07-06 1991-04-05 Commissariat Energie Atomique Evaporateur a bombardement electronique muni de moyens de recuperation des electrons retrodiffuses
DE3832693A1 (de) * 1988-09-27 1990-03-29 Leybold Ag Vorrichtung zum aufbringen dielektrischer oder metallischer werkstoffe
US5858456A (en) * 1991-02-06 1999-01-12 Applied Vacuum Technologies 1 Ab Method for metal coating discrete objects by vapor deposition
GB2261226B (en) * 1991-11-08 1994-10-26 Univ Hull Deposition of non-conductive material
US8373427B2 (en) 2010-02-10 2013-02-12 Skyworks Solutions, Inc. Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3177535A (en) * 1960-06-21 1965-04-13 Stauffer Chemical Co Electron beam furnace with low beam source
US3196246A (en) * 1962-11-29 1965-07-20 Rca Corp Means for observing a workpiece in electron beam machining apparatus
US3297944A (en) * 1963-01-02 1967-01-10 Hughes Aircraft Co Evaporation rate monitor using two integrated ion gauges
US3202794A (en) * 1963-02-18 1965-08-24 Thermionics Lab Inc Permanent magnet transverse electron beam evaporation source

Also Published As

Publication number Publication date
DE1521363B2 (de) 1975-09-25
GB1154237A (en) 1969-06-04
DE1521363A1 (de) 1969-07-24
US3390249A (en) 1968-06-25

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