Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/16—Vessels; Containers
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
  • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
  • H01J37/15—External mechanical adjustment of electron or ion optical components
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/21—Means for adjusting the focus

Landscapes

• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Physical Vapour Deposition (AREA)
• Electron Sources, Ion Sources (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=19789292

Family Applications (1)

Country Status (5)

Family Cites Families (3)

• 1964
  • 1964-02-14 NL NL6401328A patent/NL6401328A/xx unknown
• 1965
  • 1965-02-11 LU LU47965A patent/LU47965A1/xx unknown
  • 1965-02-12 GB GB625565A patent/GB1096261A/en not_active Expired
  • 1965-02-12 BE BE659687A patent/BE659687A/xx unknown
  • 1965-02-12 DE DEE28693A patent/DE1224853B/de active Pending

Also Published As

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