BE633078A - - Google Patents
Info
- Publication number
- BE633078A BE633078A BE633078DA BE633078A BE 633078 A BE633078 A BE 633078A BE 633078D A BE633078D A BE 633078DA BE 633078 A BE633078 A BE 633078A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR899323A FR1354784A (en) | 1962-05-30 | 1962-05-30 | Electron gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE633078A true BE633078A (en) |
Family
ID=8780121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE633078D BE633078A (en) | 1962-05-30 |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE633078A (en) |
| DE (1) | DE1876616U (en) |
| FR (1) | FR1354784A (en) |
| GB (1) | GB1020725A (en) |
| LU (1) | LU43749A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69131870T2 (en) * | 1990-08-10 | 2000-08-17 | Koninkl Philips Electronics Nv | Charge beam device |
| JP2732961B2 (en) * | 1991-07-18 | 1998-03-30 | 株式会社日立製作所 | Charged particle beam equipment |
-
0
- BE BE633078D patent/BE633078A/xx unknown
-
1962
- 1962-05-30 FR FR899323A patent/FR1354784A/en not_active Expired
-
1963
- 1963-05-15 LU LU43749D patent/LU43749A1/xx unknown
- 1963-05-17 DE DE1963C0010512 patent/DE1876616U/en not_active Expired
- 1963-05-22 GB GB2039963A patent/GB1020725A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1876616U (en) | 1963-08-01 |
| FR1354784A (en) | 1964-03-13 |
| LU43749A1 (en) | 1963-07-15 |
| GB1020725A (en) | 1966-02-23 |