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Filing date
Publication date
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Publication of BE568330ApublicationCriticalpatent/BE568330A/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32018—Glow discharge
C—CHEMISTRY; METALLURGY
C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
C22B9/16—Remelting metals
C22B9/22—Remelting metals with heating by wave energy or particle radiation
C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching