BE438468A - - Google Patents

Info

Publication number
BE438468A
BE438468A BE438468DA BE438468A BE 438468 A BE438468 A BE 438468A BE 438468D A BE438468D A BE 438468DA BE 438468 A BE438468 A BE 438468A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE438468A publication Critical patent/BE438468A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
BE438468D 1939-05-08 BE438468A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2266218X 1939-05-08

Publications (1)

Publication Number Publication Date
BE438468A true BE438468A (fr)

Family

ID=7993013

Family Applications (1)

Application Number Title Priority Date Filing Date
BE438468D BE438468A (fr) 1939-05-08

Country Status (2)

Country Link
US (1) US2266218A (fr)
BE (1) BE438468A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR964837A (fr) * 1942-12-01 1950-08-25
NL263646A (fr) * 1960-04-16
US3299308A (en) * 1963-07-19 1967-01-17 Temescal Metallurgical Corp Electron beam traverse of narrow aperture in barrier separating regions of differentpressure
US3809899A (en) * 1972-08-17 1974-05-07 Tektronix Inc Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
DE3407050A1 (de) * 1984-02-27 1985-09-05 Siemens AG, 1000 Berlin und 8000 München Korpuskelbeschleunigende elektrode
US5376799A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Turbo-pumped scanning electron microscope

Also Published As

Publication number Publication date
US2266218A (en) 1941-12-16

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