AUPO986697A0 - Apparatus for controlled venting of a chamber - Google Patents

Apparatus for controlled venting of a chamber

Info

Publication number
AUPO986697A0
AUPO986697A0 AUPO9866A AUPO986697A AUPO986697A0 AU PO986697 A0 AUPO986697 A0 AU PO986697A0 AU PO9866 A AUPO9866 A AU PO9866A AU PO986697 A AUPO986697 A AU PO986697A AU PO986697 A0 AUPO986697 A0 AU PO986697A0
Authority
AU
Australia
Prior art keywords
chamber
controlled venting
venting
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AUPO9866A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Australia Ltd
Original Assignee
Mitsubishi Australia Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Australia Ltd filed Critical Mitsubishi Australia Ltd
Priority to AUPO9866A priority Critical patent/AUPO986697A0/en
Publication of AUPO986697A0 publication Critical patent/AUPO986697A0/en
Abandoned legal-status Critical Current

Links

AUPO9866A 1997-10-17 1997-10-17 Apparatus for controlled venting of a chamber Abandoned AUPO986697A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AUPO9866A AUPO986697A0 (en) 1997-10-17 1997-10-17 Apparatus for controlled venting of a chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPO9866A AUPO986697A0 (en) 1997-10-17 1997-10-17 Apparatus for controlled venting of a chamber

Publications (1)

Publication Number Publication Date
AUPO986697A0 true AUPO986697A0 (en) 1997-11-13

Family

ID=3804145

Family Applications (1)

Application Number Title Priority Date Filing Date
AUPO9866A Abandoned AUPO986697A0 (en) 1997-10-17 1997-10-17 Apparatus for controlled venting of a chamber

Country Status (1)

Country Link
AU (1) AUPO986697A0 (en)

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