AU957413B - Process forthe manufacture of aluminium nitride
- Google Patents
Process forthe manufacture of aluminium nitride
Info
Publication number
AU957413B
AU957413BAU9574/13AAU957413AAU957413BAU 957413 BAU957413 BAU 957413BAU 9574/13 AAU9574/13 AAU 9574/13AAU 957413 AAU957413 AAU 957413AAU 957413 BAU957413 BAU 957413B
Authority
AU
Australia
Prior art keywords
aluminium nitride
process forthe
forthe manufacture
manufacture
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soc Gen Des Nitrdres
Original Assignee
Soc Gen Des Nitrdres
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soc Gen Des NitrdresfiledCriticalSoc Gen Des Nitrdres
Priority to AU9574/13ApriorityCriticalpatent/AU957413B/en
Publication of AU957413ApublicationCriticalpatent/AU957413A/en
Publication of AU957413BpublicationCriticalpatent/AU957413B/en