AU8725198A - Device for intermediate storage of wafers - Google Patents

Device for intermediate storage of wafers

Info

Publication number
AU8725198A
AU8725198A AU87251/98A AU8725198A AU8725198A AU 8725198 A AU8725198 A AU 8725198A AU 87251/98 A AU87251/98 A AU 87251/98A AU 8725198 A AU8725198 A AU 8725198A AU 8725198 A AU8725198 A AU 8725198A
Authority
AU
Australia
Prior art keywords
wafers
intermediate storage
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU87251/98A
Inventor
Christian Balg
Jakob Blattner
Bernhard Strasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Staeubli AG
Original Assignee
Staeubli AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Staeubli AG filed Critical Staeubli AG
Publication of AU8725198A publication Critical patent/AU8725198A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU87251/98A 1997-08-25 1998-08-24 Device for intermediate storage of wafers Abandoned AU8725198A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP97114683A EP0899776A1 (en) 1997-08-25 1997-08-25 Apparatus for the intermediate storage of wafers
EP97114683 1997-08-25
PCT/CH1998/000363 WO1999010915A1 (en) 1997-08-25 1998-08-24 Device for intermediate storage of wafers

Publications (1)

Publication Number Publication Date
AU8725198A true AU8725198A (en) 1999-03-16

Family

ID=8227269

Family Applications (1)

Application Number Title Priority Date Filing Date
AU87251/98A Abandoned AU8725198A (en) 1997-08-25 1998-08-24 Device for intermediate storage of wafers

Country Status (3)

Country Link
EP (1) EP0899776A1 (en)
AU (1) AU8725198A (en)
WO (1) WO1999010915A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10053232C2 (en) * 2000-10-26 2002-10-10 Leica Microsystems Substrate feed module and system of substrate feed module and work station
DE102008002756A1 (en) 2008-01-24 2009-08-06 Vistec Semiconductor Systems Gmbh Apparatus for measuring or inspecting substrates of the semiconductor industry

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5387265A (en) * 1991-10-29 1995-02-07 Kokusai Electric Co., Ltd. Semiconductor wafer reaction furnace with wafer transfer means
US5378145A (en) * 1992-07-15 1995-01-03 Tokyo Electron Kabushiki Kaisha Treatment system and treatment apparatus
JP3258748B2 (en) * 1993-02-08 2002-02-18 東京エレクトロン株式会社 Heat treatment equipment

Also Published As

Publication number Publication date
WO1999010915A1 (en) 1999-03-04
EP0899776A1 (en) 1999-03-03

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