AU7937198A - Discharge tube and method of calibrating laser wavelength by using the same - Google Patents

Discharge tube and method of calibrating laser wavelength by using the same

Info

Publication number
AU7937198A
AU7937198A AU79371/98A AU7937198A AU7937198A AU 7937198 A AU7937198 A AU 7937198A AU 79371/98 A AU79371/98 A AU 79371/98A AU 7937198 A AU7937198 A AU 7937198A AU 7937198 A AU7937198 A AU 7937198A
Authority
AU
Australia
Prior art keywords
same
discharge tube
laser wavelength
calibrating laser
calibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU79371/98A
Inventor
Shiro Ikeda
Koji Matsushita
Hidenaga Warashina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of AU7937198A publication Critical patent/AU7937198A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
AU79371/98A 1997-07-03 1998-07-03 Discharge tube and method of calibrating laser wavelength by using the same Abandoned AU7937198A (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP17857597 1997-07-03
JP9-178575 1997-07-03
JP8423498 1998-03-30
JP10-84234 1998-03-30
JP10-140130 1998-05-21
JP14013098 1998-05-21
PCT/JP1998/003009 WO1999001890A1 (en) 1997-07-03 1998-07-03 Discharge tube and method of calibrating laser wavelength by using the same

Publications (1)

Publication Number Publication Date
AU7937198A true AU7937198A (en) 1999-01-25

Family

ID=27304490

Family Applications (1)

Application Number Title Priority Date Filing Date
AU79371/98A Abandoned AU7937198A (en) 1997-07-03 1998-07-03 Discharge tube and method of calibrating laser wavelength by using the same

Country Status (2)

Country Link
AU (1) AU7937198A (en)
WO (1) WO1999001890A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5493100B2 (en) * 2008-12-04 2014-05-14 株式会社オーク製作所 Discharge lamp
JP2013532349A (en) * 2010-05-05 2013-08-15 ペルキネルマー ヘルス サイエンシーズ， インコーポレイテッド Oxidation resistance induction device
JP6210526B2 (en) 2011-07-06 2017-10-11 ギガフォトン株式会社 Wavelength detector, wavelength calibration system
US9983060B1 (en) 2016-11-28 2018-05-29 Cymer, Llc Calibration of a spectral analysis module

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017794B1 (en) * 1970-03-23 1975-06-24
JPS51896A (en) * 1974-06-20 1976-01-07 Mitsubishi Electric Corp Yokohokoreikigata co2 reezahatsushinsochi
DE3224644A1 (en) * 1982-07-01 1984-01-05 Radij Konstantinovič Čužko Cathode for gas lasers and method for producing it
JPS63280483A (en) * 1987-05-13 1988-11-17 Canon Inc Light source for exposure device
JPS6422086A (en) * 1987-07-17 1989-01-25 Komatsu Mfg Co Ltd Control equipment for laser wavelength
US4823354A (en) * 1987-12-15 1989-04-18 Lumonics Inc. Excimer lasers
DE3744323C2 (en) * 1987-12-28 1999-03-11 Lambda Physik Forschung Method and device for stabilizing the frequency of a laser beam
JP2791038B2 (en) * 1988-06-24 1998-08-27 株式会社日立製作所 Spectroscope, projection exposure apparatus and projection exposure method using the same
JP2737181B2 (en) * 1988-11-30 1998-04-08 株式会社ニコン Excimer laser generator
JPH0638533B2 (en) * 1989-02-16 1994-05-18 工業技術院長 Wavelength control device for banded excimer laser
JP2726481B2 (en) * 1989-03-10 1998-03-11 株式会社東芝 Method for manufacturing MOS type semiconductor device
JPH09121067A (en) * 1995-10-25 1997-05-06 Mitsubishi Heavy Ind Ltd Method for calibrating laser wavelength
JP2776413B2 (en) * 1996-01-16 1998-07-16 日本電気株式会社 Narrow band excimer laser device

Also Published As

Publication number Publication date
WO1999001890A1 (en) 1999-01-14

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase