AU7874198A - Vacuum treatment equipment - Google Patents

Vacuum treatment equipment

Info

Publication number
AU7874198A
AU7874198A AU78741/98A AU7874198A AU7874198A AU 7874198 A AU7874198 A AU 7874198A AU 78741/98 A AU78741/98 A AU 78741/98A AU 7874198 A AU7874198 A AU 7874198A AU 7874198 A AU7874198 A AU 7874198A
Authority
AU
Australia
Prior art keywords
treatment equipment
vacuum treatment
vacuum
equipment
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU78741/98A
Inventor
Roman Schertler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of AU7874198A publication Critical patent/AU7874198A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
AU78741/98A 1996-12-23 1997-12-23 Vacuum treatment equipment Abandoned AU7874198A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH317996 1996-12-23
CH3179/96 1996-12-23
PCT/CH1997/000482 WO1998028461A1 (en) 1996-12-23 1997-12-23 Vacuum treatment equipment

Publications (1)

Publication Number Publication Date
AU7874198A true AU7874198A (en) 1998-07-17

Family

ID=4250338

Family Applications (1)

Application Number Title Priority Date Filing Date
AU78741/98A Abandoned AU7874198A (en) 1996-12-23 1997-12-23 Vacuum treatment equipment

Country Status (4)

Country Link
EP (1) EP0946781A1 (en)
JP (1) JP2001506701A (en)
AU (1) AU7874198A (en)
WO (1) WO1998028461A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2085494B1 (en) * 2008-02-01 2011-08-03 Applied Materials, Inc. Twin-type coating device with improved separating plate
DE102012104475A1 (en) * 2012-05-24 2013-11-28 Aixtron Se Device useful for depositing layer on substrate comprises processing chamber having susceptor heated by heating device for receiving substrate, gas inlet element, gas outlet element and gas-tight reactor housing which is outwardly arranged

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6052574A (en) * 1983-09-02 1985-03-25 Hitachi Ltd Continuous sputtering device
JPH07116586B2 (en) * 1990-05-31 1995-12-13 株式会社芝浦製作所 Piping device with valve mechanism

Also Published As

Publication number Publication date
WO1998028461A1 (en) 1998-07-02
EP0946781A1 (en) 1999-10-06
JP2001506701A (en) 2001-05-22

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