AU7829798A - Improved stylus profiler and array - Google Patents

Improved stylus profiler and array

Info

Publication number
AU7829798A
AU7829798A AU78297/98A AU7829798A AU7829798A AU 7829798 A AU7829798 A AU 7829798A AU 78297/98 A AU78297/98 A AU 78297/98A AU 7829798 A AU7829798 A AU 7829798A AU 7829798 A AU7829798 A AU 7829798A
Authority
AU
Australia
Prior art keywords
array
stylus profiler
improved stylus
improved
profiler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU78297/98A
Inventor
William P Kuhn
Thomas Mcwaid
Amin Samsavar
Michael Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Publication of AU7829798A publication Critical patent/AU7829798A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
AU78297/98A 1997-06-10 1998-06-10 Improved stylus profiler and array Abandoned AU7829798A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US87266597A 1997-06-10 1997-06-10
US08872665 1997-06-10
PCT/US1998/011911 WO1998057119A1 (en) 1997-06-10 1998-06-10 Improved stylus profiler and array

Publications (1)

Publication Number Publication Date
AU7829798A true AU7829798A (en) 1998-12-30

Family

ID=25360065

Family Applications (1)

Application Number Title Priority Date Filing Date
AU78297/98A Abandoned AU7829798A (en) 1997-06-10 1998-06-10 Improved stylus profiler and array

Country Status (3)

Country Link
JP (1) JP2002507281A (en)
AU (1) AU7829798A (en)
WO (1) WO1998057119A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101626322B1 (en) * 2015-11-18 2016-06-01 황재은 Shape measurement apparatus
CN106908017B (en) * 2017-02-24 2019-03-29 哈尔滨工业大学 Free-float space robot device and its measurement method based on metal human lymph node fluorescence

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4013742C2 (en) * 1990-04-28 1994-06-30 Focus Mestechnik Gmbh & Co Kg Scanning head for a machine for measuring the micro surface contour of workpieces
US5444244A (en) * 1993-06-03 1995-08-22 Park Scientific Instruments Corporation Piezoresistive cantilever with integral tip for scanning probe microscope

Also Published As

Publication number Publication date
WO1998057119A1 (en) 1998-12-17
JP2002507281A (en) 2002-03-05

Similar Documents

Publication Publication Date Title
AU2453595A (en) Capacitance-sensitive switch and switch array
AU4339097A (en) Carbamate-derivatized nucleosides and oligonucleosides
AU9781998A (en) Huchordin and uses thereof
AU6068998A (en) Acrylic copolymers
AU8412298A (en) An improved dust ruffle structure
AU9126698A (en) Dust ruffle construction
AU5293698A (en) Mat
AU1527499A (en) Pen
AU1752297A (en) Interdigitated memory array
GB9807636D0 (en) Computers
AU7038198A (en) Computer memory organization
AU8695298A (en) Compounds and uses thereof
AUPN710995A0 (en) Hydrophone and array thereof
AUPO741897A0 (en) Computer keyboard-midi interface
AU7829798A (en) Improved stylus profiler and array
AU7577898A (en) Human 3-hydroxyisobutyryl-coenzyme a hydrolase
AU5478498A (en) Contact and control module
AU3789199A (en) Raq genes and their uses
AU8693198A (en) Compounds and uses thereof
IL134377A0 (en) Computer
AU1664299A (en) Autodegradable microcarriers and their use
AU1575199A (en) Electronic pen
AU6833998A (en) Personal grounding
AU4325797A (en) Acetaminophen and cisapride analgesics
AUPO745297A0 (en) Holophotal array

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase