AU773961A - Arrangement for etching semiconductor devices - Google Patents

Arrangement for etching semiconductor devices

Info

Publication number
AU773961A
AU773961A AU7739/61A AU773961A AU773961A AU 773961 A AU773961 A AU 773961A AU 7739/61 A AU7739/61 A AU 7739/61A AU 773961 A AU773961 A AU 773961A AU 773961 A AU773961 A AU 773961A
Authority
AU
Australia
Prior art keywords
arrangement
semiconductor devices
etching semiconductor
etching
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU7739/61A
Other versions
AU245942B2 (en
Inventor
Hansmeyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefunken Patentverwertungs GmbH
Original Assignee
Telefunken Patentverwertungs GmbH
Filing date
Publication date
Application filed by Telefunken Patentverwertungs GmbH filed Critical Telefunken Patentverwertungs GmbH
Application granted granted Critical
Publication of AU773961A publication Critical patent/AU773961A/en
Publication of AU245942B2 publication Critical patent/AU245942B2/en
Expired legal-status Critical Current

Links

AU7739/61A 1961-08-07 Arrangement for etching semiconductor devices Expired AU245942B2 (en)

Publications (2)

Publication Number Publication Date
AU773961A true AU773961A (en) 1963-05-02
AU245942B2 AU245942B2 (en) 1963-05-02

Family

ID=

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