AU7732396A - Platen for use with stages and method of making same - Google Patents

Platen for use with stages and method of making same

Info

Publication number
AU7732396A
AU7732396A AU77323/96A AU7732396A AU7732396A AU 7732396 A AU7732396 A AU 7732396A AU 77323/96 A AU77323/96 A AU 77323/96A AU 7732396 A AU7732396 A AU 7732396A AU 7732396 A AU7732396 A AU 7732396A
Authority
AU
Australia
Prior art keywords
platen
stages
making same
making
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU77323/96A
Inventor
Craig R. Simpson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MRS TECHNOLOGIES Inc
Original Assignee
MRS TECHNOLOGIES Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MRS TECHNOLOGIES Inc filed Critical MRS TECHNOLOGIES Inc
Publication of AU7732396A publication Critical patent/AU7732396A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/02—Details of the magnetic circuit characterised by the magnetic material
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Linear Motors (AREA)
AU77323/96A 1995-11-17 1996-11-15 Platen for use with stages and method of making same Abandoned AU7732396A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US56039395A 1995-11-17 1995-11-17
US560393 1995-11-17
PCT/US1996/018256 WO1997019509A1 (en) 1995-11-17 1996-11-15 Platen for use with stages and method of making same

Publications (1)

Publication Number Publication Date
AU7732396A true AU7732396A (en) 1997-06-11

Family

ID=24237619

Family Applications (1)

Application Number Title Priority Date Filing Date
AU77323/96A Abandoned AU7732396A (en) 1995-11-17 1996-11-15 Platen for use with stages and method of making same

Country Status (2)

Country Link
AU (1) AU7732396A (en)
WO (1) WO1997019509A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5965962A (en) * 1998-02-20 1999-10-12 Northern Magnetics, Inc. Linear stepper motor
WO2019158448A1 (en) 2018-02-14 2019-08-22 Asml Netherlands B.V. Substrate positioning device and electron beam inspection tool

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3656014A (en) * 1971-04-08 1972-04-11 Gerber Scientific Instr Co Damping apparatus for a linear step motor having two translational degrees of freedom
JPS62144557A (en) * 1985-12-18 1987-06-27 Toshiba Corp Rotor core for stepping motor
US5015622A (en) * 1989-10-17 1991-05-14 Alfred University Multidirectional/rotational superconductor motor
US5126648A (en) * 1990-03-22 1992-06-30 Megamation Incorporated High resolution piggyback linear motor design for placement systems and the like

Also Published As

Publication number Publication date
WO1997019509A1 (en) 1997-05-29

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