AU7401294A - Methods and apparatus for water desorption of vacuum chambers - Google Patents

Methods and apparatus for water desorption of vacuum chambers

Info

Publication number
AU7401294A
AU7401294A AU74012/94A AU7401294A AU7401294A AU 7401294 A AU7401294 A AU 7401294A AU 74012/94 A AU74012/94 A AU 74012/94A AU 7401294 A AU7401294 A AU 7401294A AU 7401294 A AU7401294 A AU 7401294A
Authority
AU
Australia
Prior art keywords
methods
vacuum chambers
water desorption
desorption
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU74012/94A
Inventor
Frank Scuotto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Materials Research Corp
Original Assignee
Materials Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials Research Corp filed Critical Materials Research Corp
Publication of AU7401294A publication Critical patent/AU7401294A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32853—Hygiene
    • H01J37/32862—In situ cleaning of vessels and/or internal parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/182—Obtaining or maintaining desired pressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
AU74012/94A 1993-07-22 1994-07-20 Methods and apparatus for water desorption of vacuum chambers Abandoned AU7401294A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9579593A 1993-07-22 1993-07-22
US095795 1993-07-22
PCT/US1994/008185 WO1995003622A1 (en) 1993-07-22 1994-07-20 Methods and apparatus for water desorption of vacuum chambers

Publications (1)

Publication Number Publication Date
AU7401294A true AU7401294A (en) 1995-02-20

Family

ID=22253617

Family Applications (1)

Application Number Title Priority Date Filing Date
AU74012/94A Abandoned AU7401294A (en) 1993-07-22 1994-07-20 Methods and apparatus for water desorption of vacuum chambers

Country Status (2)

Country Link
AU (1) AU7401294A (en)
WO (1) WO1995003622A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1528430A1 (en) * 2003-10-30 2005-05-04 ASML Netherlands B.V. A device manufacturing method, as well as a lithographic apparatus
US10578510B2 (en) 2016-11-28 2020-03-03 Applied Materials, Inc. Device for desorbing molecules from chamber walls

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4660297A (en) * 1985-11-01 1987-04-28 Philip Danielson Desorption of water molecules in a vacuum system using ultraviolet radiation
CA1300357C (en) * 1986-04-04 1992-05-12 Materials Research Corporation Method and apparatus for handling and processing wafer-like materials
JPS63274446A (en) * 1987-05-01 1988-11-11 Nec Corp Method and apparatus for baking using vacuum apparatus
JPH0295431A (en) * 1988-09-30 1990-04-06 Ushio Inc Method for degassing inside of vacuum vessel and vacuum device

Also Published As

Publication number Publication date
WO1995003622A1 (en) 1995-02-02

Similar Documents

Publication Publication Date Title
AU664246B2 (en) Process and apparatus for the purification of water
AU2650795A (en) Methods and apparatus for cryopreservation of cells
AU662869B2 (en) Plasma sterilizer and method
AU7379896A (en) Method and apparatus for improving the function of sensory cells
AU6844694A (en) Novel process and apparatus
AU6527294A (en) Solid-tumor treatment method
AU5912294A (en) Gas flushing apparatus and method
AU5529094A (en) Purification method and apparatus
AU6570894A (en) Resuscitation apparatus
AU672460B2 (en) Method of making sorbent articles
AU1951895A (en) Process and apparatus for the purification of gases
AU5762794A (en) Freezing apparatus and method
AU6291894A (en) Method and apparatus for purifying water
AU691702B2 (en) Water purification process and apparatus
AU4786193A (en) Water valve apparatus
AU5609596A (en) Adsorption process
AU7422994A (en) Massaging apparatus
AU7733694A (en) Improved photokeratoscope apparatus and method
AU4489693A (en) Apparatus and methods for improved construction
AU3953195A (en) Lime mud regeneration process and apparatus
AU1334295A (en) Method and apparatus for release of sorbed gas
AU7318396A (en) Methods of preserving microorganisms
AU6422494A (en) Method for ultra-trace level analysis of water
AU7401294A (en) Methods and apparatus for water desorption of vacuum chambers
AU6620996A (en) Gas treatment apparatus