AU7361096A - Concentric dual elbow - Google Patents

Concentric dual elbow

Info

Publication number
AU7361096A
AU7361096A AU73610/96A AU7361096A AU7361096A AU 7361096 A AU7361096 A AU 7361096A AU 73610/96 A AU73610/96 A AU 73610/96A AU 7361096 A AU7361096 A AU 7361096A AU 7361096 A AU7361096 A AU 7361096A
Authority
AU
Australia
Prior art keywords
concentric dual
dual elbow
elbow
concentric
dual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU73610/96A
Other languages
English (en)
Inventor
Matthew J. Van Doren
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML US Inc
Original Assignee
ASML US Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML US Inc filed Critical ASML US Inc
Publication of AU7361096A publication Critical patent/AU7361096A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B25J19/0029—Means for supplying energy to the end effector arranged within the different robot elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU73610/96A 1995-09-13 1996-09-13 Concentric dual elbow Abandoned AU7361096A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US527800 1990-05-23
US52780095A 1995-09-13 1995-09-13
PCT/US1996/014677 WO1997010079A1 (fr) 1995-09-13 1996-09-13 Double coude concentrique

Publications (1)

Publication Number Publication Date
AU7361096A true AU7361096A (en) 1997-04-01

Family

ID=24102975

Family Applications (1)

Application Number Title Priority Date Filing Date
AU73610/96A Abandoned AU7361096A (en) 1995-09-13 1996-09-13 Concentric dual elbow

Country Status (2)

Country Link
AU (1) AU7361096A (fr)
WO (1) WO1997010079A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3947761B2 (ja) * 1996-09-26 2007-07-25 株式会社日立国際電気 基板処理装置、基板搬送機および基板処理方法
US6326755B1 (en) * 2000-04-12 2001-12-04 Asyst Technologies, Inc. System for parallel processing of workpieces
EP1310986A1 (fr) * 2001-11-08 2003-05-14 F & K Delvotec Bondtechnik GmbH Mécanisme de changement de plaquettes porteuses de puces
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
DE102009010444B4 (de) * 2009-02-25 2013-05-16 AJ Cybertron Gesellschaft für Laborautomationssysteme mbH Positioniervorrichtung zur Positionierung eines Endabschnitts relativ zu einer Behälteranordnung
US9076830B2 (en) * 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
WO2013090181A1 (fr) * 2011-12-12 2013-06-20 Applied Materials, Inc Systèmes, appareil et procédés de robots complètement indépendants adaptés pour transporter des substrats multiples dans la fabrication de dispositifs électroniques
RU2483670C1 (ru) * 2011-12-20 2013-06-10 Юрий Иванович Русанов Устройство разворота диагностических и хирургических элементов многофункциональной дагностико-хирургической робототехнической системы операционного стола с возможностью информационно-компьютерного управления им ю.и. русанова
US9799544B2 (en) * 2015-10-23 2017-10-24 Applied Materials, Inc. Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5004399A (en) * 1987-09-04 1991-04-02 Texas Instruments Incorporated Robot slice aligning end effector
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
US5102280A (en) * 1989-03-07 1992-04-07 Ade Corporation Robot prealigner

Also Published As

Publication number Publication date
WO1997010079A1 (fr) 1997-03-20

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