AU6683200A - Handling system - Google Patents

Handling system

Info

Publication number
AU6683200A
AU6683200A AU66832/00A AU6683200A AU6683200A AU 6683200 A AU6683200 A AU 6683200A AU 66832/00 A AU66832/00 A AU 66832/00A AU 6683200 A AU6683200 A AU 6683200A AU 6683200 A AU6683200 A AU 6683200A
Authority
AU
Australia
Prior art keywords
handling system
handling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU66832/00A
Inventor
Rolf Hartung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centrotherm Elektrische Anlagen GmbH and Co
Original Assignee
Centrotherm Elektrische Anlagen GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centrotherm Elektrische Anlagen GmbH and Co filed Critical Centrotherm Elektrische Anlagen GmbH and Co
Publication of AU6683200A publication Critical patent/AU6683200A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
AU66832/00A 1999-07-12 2000-07-12 Handling system Abandoned AU6683200A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19932063 1999-07-12
DE19932063 1999-07-12
PCT/DE2000/002257 WO2001004932A1 (en) 1999-07-12 2000-07-12 Handling system

Publications (1)

Publication Number Publication Date
AU6683200A true AU6683200A (en) 2001-01-30

Family

ID=7914228

Family Applications (1)

Application Number Title Priority Date Filing Date
AU66832/00A Abandoned AU6683200A (en) 1999-07-12 2000-07-12 Handling system

Country Status (5)

Country Link
EP (1) EP1194948B1 (en)
AU (1) AU6683200A (en)
DE (2) DE50013953D1 (en)
ES (1) ES2280236T3 (en)
WO (1) WO2001004932A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015104120B3 (en) * 2015-03-19 2016-07-28 Vogel Moulds And Machines Ag Vacuum pressure casting machine with a casting device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816116A (en) * 1985-10-24 1989-03-28 Texas Instruments Incorporated Semiconductor wafer transfer method and arm mechanism
JPH06283457A (en) * 1993-03-30 1994-10-07 Nec Kansai Ltd Low heat capacity-type fork for diffusion furnace
JPH08222616A (en) * 1995-02-13 1996-08-30 Dainippon Screen Mfg Co Ltd Substrate processor
JP3779393B2 (en) * 1996-09-06 2006-05-24 東京エレクトロン株式会社 Processing system

Also Published As

Publication number Publication date
EP1194948A1 (en) 2002-04-10
DE10081991D2 (en) 2002-06-20
ES2280236T3 (en) 2007-09-16
EP1194948B1 (en) 2007-01-10
DE50013953D1 (en) 2007-02-22
WO2001004932A1 (en) 2001-01-18

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase