AU6472196A - Xy displacement device - Google Patents

Xy displacement device

Info

Publication number
AU6472196A
AU6472196A AU64721/96A AU6472196A AU6472196A AU 6472196 A AU6472196 A AU 6472196A AU 64721/96 A AU64721/96 A AU 64721/96A AU 6472196 A AU6472196 A AU 6472196A AU 6472196 A AU6472196 A AU 6472196A
Authority
AU
Australia
Prior art keywords
displacement device
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU64721/96A
Inventor
Willem Christiaan Heerens
Albert Edmond Holman
Charles David Laham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universiteit Delft
Original Assignee
Technische Universiteit Delft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universiteit Delft filed Critical Technische Universiteit Delft
Publication of AU6472196A publication Critical patent/AU6472196A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
AU64721/96A 1995-07-14 1996-07-12 Xy displacement device Abandoned AU6472196A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL1000815A NL1000815C2 (en) 1995-07-14 1995-07-14 XY displacement device.
NL1000815 1995-07-14
PCT/NL1996/000285 WO1997004475A1 (en) 1995-07-14 1996-07-12 Xy displacement device

Publications (1)

Publication Number Publication Date
AU6472196A true AU6472196A (en) 1997-02-18

Family

ID=19761322

Family Applications (1)

Application Number Title Priority Date Filing Date
AU64721/96A Abandoned AU6472196A (en) 1995-07-14 1996-07-12 Xy displacement device

Country Status (5)

Country Link
EP (1) EP0871974A1 (en)
JP (1) JPH11509324A (en)
AU (1) AU6472196A (en)
NL (1) NL1000815C2 (en)
WO (1) WO1997004475A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6664067B1 (en) * 2000-05-26 2003-12-16 Symyx Technologies, Inc. Instrument for high throughput measurement of material physical properties and method of using same
JP6318960B2 (en) * 2014-08-05 2018-05-09 日本精工株式会社 Table device, measuring device, semiconductor manufacturing device, flat panel display manufacturing device, and machine tool

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642438A (en) * 1984-11-19 1987-02-10 International Business Machines Corporation Workpiece mounting and clamping system having submicron positioning repeatability
DE68911330T2 (en) * 1988-02-08 1994-05-26 Toshiba Kawasaki Kk Device with an alignment frame.
JP2577423B2 (en) * 1988-02-29 1997-01-29 工業技術院長 Large-stroke scanning tunneling microscope
JP3060527B2 (en) * 1990-11-13 2000-07-10 松下電器産業株式会社 Positioning device

Also Published As

Publication number Publication date
EP0871974A1 (en) 1998-10-21
WO1997004475A1 (en) 1997-02-06
JPH11509324A (en) 1999-08-17
NL1000815C2 (en) 1997-01-15

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