AU6350099A - Contaminant removal method - Google Patents

Contaminant removal method

Info

Publication number
AU6350099A
AU6350099A AU63500/99A AU6350099A AU6350099A AU 6350099 A AU6350099 A AU 6350099A AU 63500/99 A AU63500/99 A AU 63500/99A AU 6350099 A AU6350099 A AU 6350099A AU 6350099 A AU6350099 A AU 6350099A
Authority
AU
Australia
Prior art keywords
removal method
contaminant removal
contaminant
removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU63500/99A
Inventor
John Cameron Barnard
Yu Chen
Richard Edward Palmer
Jens Schmidt
Lidija Siller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Birmingham
Original Assignee
University of Birmingham
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Birmingham filed Critical University of Birmingham
Publication of AU6350099A publication Critical patent/AU6350099A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02046—Dry cleaning only
AU63500/99A 1998-10-14 1999-10-14 Contaminant removal method Abandoned AU6350099A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9822294 1998-10-14
GBGB9822294.6A GB9822294D0 (en) 1998-10-14 1998-10-14 Contaminant removal method
PCT/GB1999/003409 WO2000022661A1 (en) 1998-10-14 1999-10-14 Contaminant removal method

Publications (1)

Publication Number Publication Date
AU6350099A true AU6350099A (en) 2000-05-01

Family

ID=10840466

Family Applications (1)

Application Number Title Priority Date Filing Date
AU63500/99A Abandoned AU6350099A (en) 1998-10-14 1999-10-14 Contaminant removal method

Country Status (5)

Country Link
EP (1) EP1133790A1 (en)
JP (1) JP2002527902A (en)
AU (1) AU6350099A (en)
GB (1) GB9822294D0 (en)
WO (1) WO2000022661A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6554950B2 (en) 2001-01-16 2003-04-29 Applied Materials, Inc. Method and apparatus for removal of surface contaminants from substrates in vacuum applications
US7838431B2 (en) 2008-06-14 2010-11-23 Applied Materials, Inc. Method for surface treatment of semiconductor substrates
CN106933063B (en) 2012-03-20 2019-01-18 迈普尔平版印刷Ip有限公司 electron beam lithography system
CN111326405A (en) 2014-04-01 2020-06-23 Ev 集团 E·索尔纳有限责任公司 Method and device for treating a surface of a substrate
US9981293B2 (en) 2016-04-21 2018-05-29 Mapper Lithography Ip B.V. Method and system for the removal and/or avoidance of contamination in charged particle beam systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350480A (en) * 1993-07-23 1994-09-27 Aspect International, Inc. Surface cleaning and conditioning using hot neutral gas beam array
JPH10154478A (en) * 1996-11-25 1998-06-09 Hitachi Ltd Sample contaminant removing device

Also Published As

Publication number Publication date
WO2000022661A1 (en) 2000-04-20
GB9822294D0 (en) 1998-12-09
JP2002527902A (en) 2002-08-27
EP1133790A1 (en) 2001-09-19

Similar Documents

Publication Publication Date Title
AU8103998A (en) Remediation method
GB9809414D0 (en) Method
AU8009098A (en) Method for removing one or several layers selectively
AU7914898A (en) Remediation method
AU2452899A (en) Method for etching
GB9809776D0 (en) Method
AU6350099A (en) Contaminant removal method
AU1390600A (en) Method for making polyester
GB9810722D0 (en) Method
GB9802475D0 (en) Method
AU3789100A (en) Method for utilizing waste
GB9809782D0 (en) Method
GB9809780D0 (en) Method
AU2526199A (en) Method for making hydrofluorocarbon
GB9819604D0 (en) Contaminant removal
AU6198599A (en) Method for forming drops
AU4517199A (en) Demodulation method
AUPP141098A0 (en) Method
AUPP222998A0 (en) Method
AU3432799A (en) Method
AUPP764698A0 (en) Method
AU3619499A (en) Densitometry method
GB9804355D0 (en) Method
AUPP335398A0 (en) Method for repairing
AU1390700A (en) Method for making polyester

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase