AU597715B2 - Scanning electron microscope - Google Patents
Scanning electron microscope Download PDFInfo
- Publication number
- AU597715B2 AU597715B2 AU78023/87A AU7802387A AU597715B2 AU 597715 B2 AU597715 B2 AU 597715B2 AU 78023/87 A AU78023/87 A AU 78023/87A AU 7802387 A AU7802387 A AU 7802387A AU 597715 B2 AU597715 B2 AU 597715B2
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- AU
- Australia
- Prior art keywords
- microscope
- sample
- meters
- electron beam
- gaseous medium
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Description
tA-A-78023/87 ,WOR4P i TLECTUAL PROPERTY ORGANIZATION Intematioril Bureau
KPCT
INT'ERNATIONAL APPLICATION PU B1,j4HED UNDER THE PATE NT CDOPERATIO N TREATY (P-CT) PatntClif'jtj0'0 4(1 International Publication Number: WO 98/ 01099 HOIJ 37/28 At )ntratoa Pub cai ae -iebruary 1988 (11.02.88) V Intrtional, Appilation Numaber: PCT/US844W8 esign ted Staks: AT (European patent), AU, BE (Europe patent), CH (European patent), DE (Euro- (22) IqternatioykaI Filing Date: 30 July 1997 (3O1- u%7 pean patent), FR (European patent), GB1 (European patent), IT (European patent), JP, LU (European pa- 01)-ri~ity policoion other-iPH 221 tent), NL (European patent), SE (European patent).
(32).Priority Date: I August 1986 (01,08.86) Published (33) Prorit Contry AUWilli international search report.
A.0. J. P. 2 4 MAR 1988 (71) Applicant.~ ELECTRO-SCAN CORPORATION [US! US]; 10'0 Rosewood Drive, Danvers, MA 0 1923 (US).
(72) Inventor: DANILATOS, Gerasimos, D. 98 Brighton U RL4 Boulevard, North Bondi, N.SW 2026 4Fq18 (74) Agent: WHITE, John, Cooper, Dunham, Griff in PAE& Moran, 30 Rockefeller Plaza, New York, NY 10 112
(US)
This document contains the amem~ndments Made under 8'tction 49 and is correct for (54)Tjtle: MULTIPURPOSE GASEOUS DETECTOR DEVICE FOR ELECTRON MJCROSCOPES Abstract A scanning electron microscope which. detects photons produced by contact between radiation emitted from the surface af a sample lovcated on a sample platform means and gas molecules of a gaseous mediu.m which surrounds the sample. The intvention also provides a method for microscopically imaging the suxrface of a sample through the use of gaseo us photon detection.9 WO W88/01099 PCT/US87,'ii1848 MUTTIPURPOSE GASEOUS DETECTOR DEVICE, FOR 4pECTRON
,MICROSCOPES
aackground of the Inventiog $canning, electron muicroscopes and generally instruments employing an electron beam (probe), operate in vacuum (pressure, less than about 0.0001 mbar) and the s9pecirnens examined by such instruments are also placed in, vacuum. Scanning 4 sample within a vacuum presents many problems. Many biol~ogical. specimens cannot survive in vacuum. Wet specimens can experience evaporation of their fluid content before- an accurate image can be obtained. Nonconducting samples can accumulate a, surface charge which obscures the details of the sampl.e's surface and lowers. the resolution oi t~he image obtained.
An environmental scanning electron microscope (ESEM): 2S which allows the examination of specimens in a gaseous ,environment is described. in U.S. Patent No. 4,5967928 Uioweverp the predominant detection mode in the ESEM has u-tiJlized various scintillator detectors to detect bak s ca tt ar ad el ei t x7oas Additionally, an ES414 datadt.ox, 8ystem has been described wherein the WO 88/01099 -PCT/US87/0 1848 -2ionization of the gaseous environment is used as the detection means for all ionizing signals (Danilatos, Micron, 'Mitcrogc Acta 14:307-318, 1983).
On object of the. present invention is to provide a more gener al and Vu~tipxrpose means f or envirornental s canni ng el. ectrorv mcr~os~copyn rr -3- Summary of the Invention In accordance with one aspect of the present invention there is disclosed a scanning electron microscope comprising: a vacuum envelope having a pressure limiting aperture; an electron beam source located within the vacuum envelope for emitting an electron beam; focusing means located within the vacuum envelope for directing an electron beam emitted by the electron beam source through the pressure limiting aperture; electron beam scanning means located within the vacuum envelope for scanning an electron beam emitted by the electron beam source across te diameter of the pressure limiting aperture; n. sample platform means, disposed outside the vacuum envelope, for M maintaining a sample in registration with the pressure limiting aperture 5 such that a surface of the sample can be exposed to an electron beam emitted from the electron beam source and directed through the pressure Slimiting aperture so as to cause radiation to be emitted from the sample; gas containment means for maintaining the sample platform means enveloped in a gaseous medium so as to allow said radiation emitted from the sample located on the sample platform means and exposed to an electron j beam emitted from the electron beam source to come into contact with gas t molecules of the gaseous medium and cause a signal-gas interaction that produces a plurality of products; and a ,detector means for detecting products formed by an interaction of said radiation and said medium to produce image signals.
a d 0 4 L. 0,
Z
4 In accordance wlth another aspect of the present invention there is disclosed a method of microscopically imaging the surface of a sample said method comprising the steps of: surrounding the sample with a gaseous medium; scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample; interacting said radiation with said gaseous medium to produce a plurality of products; and 10 1 detecting said plurality of products to form images of the j sample.
**4 4 4 I 4a 4 1 2- WO 88/01099 PCT'/US87/91848 Brief Descri~tioi of the Figure Fig. 1 is a, sqhetatic cross-sectional vieW O~ a device which 6irbodies the preso-rit Inv~nti 9A in a pa ul ar f orm.
W\ Q88/01099 PCT/US87/01848 Detailed Description of the Invention The pre"ent invention provides a scanning electron S ficroscope. Referring in more particularity to Figure 1, the invention comprises a vacuum envelope I having a pressure limiting aperture 2. An electron beam source 3 is located within the vacuum envelope and is capable of emitting an electron beam. Focusing means 4 are located within the vacuum envelope and are capable of directing an electron beam emitted by the electron beam source through the pressure limiting aperture. Electron beam scanning means 5 are also located within the Svacuum envelope and are capable of scanning an electron beam emitted by the electron beam source across the diameter of the pressure limiting aperture.
A sample pla-form means 6 is disposed outside the vacuum envelope and is capable of maintaining a sample in registration with the pressure limiting aperture such that a surface of the sample may be exposed to an electron beam emitted from the electron beam source and directed through the pressure limiting aperture so as to cause radiation to be emitted from the sample.
0 Withan this application, "radiation* emitted from a sample means electrons or photons emitted fram the sampl e.
1 1' 'Y:Q 88/q1099 PCT/U1S87/O 1848 -7- *The scanning electron microscope of the, present inventionl curth-er comprises a gas containment means 7 capable of mainta.ining the sample platform imeans enveloped. in, a gaseous medium sol as to allow radiation emitted, from a sample located on the sample platform nteans and exposed to an electron beam emitted from tChe electron beam source to come into contact with gas molecules of the gaseous medium and cause the gas molecules to emit pho-tons. Detection means 8 are provided which are capable of detecting photons emit:ted Zrom the gas molecules of the gaseous medium.
In one embodiment of the invention, the wavelength of the photons is within the range from about 1xio0 11 meters to about 4x10-8 meters. Preferably within this embodiment of the invention the detection means is a ;sCintiliatioa counter or a lithium drifted silicon detector.
In another embodiment o4 the invention, the wavelength, Q4 thie photons. is within, the ra-nge from about 4x40-8 me te to about 740-7 nmeterz. Preferably within this embodiment of the invencion the detection means is a ph-otomultiplier tube oxr a photodiode.
I-
o ::WO 8/01099 P T US87/91848 o o -8- Ia y t another embodiment of the invention, tne wavelength of the photons is within the range from about 7 0 7 meters to about 2x10" 4 meters. Preferably within this embodiment of the invention the detection means is a photomultiplier tube or a photodiode.
The gaseous medium may comprise a single gas or a mixture of gases. In one embodiment of the invention the gaseous medium comprises nitrogen. In another embodiment of the invention the gaseous medium comprises helium.
The present invention also provides a method for micro- 0; scopically imaging the surface of a sample which comprises surrounding the sample with gas molecules and scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample. Photons which are emitted from gas molecules which come into contact with radiation emitted from the surface of the K sample are then detected, the photons being emitted from the gas in an amount proportional to the amount of radiation emitted from the surface of the sample.
Images of the sample are then formed based on the number Of photons detected.
3S WO 88/01099 PCT/US87/01848 -9- In one emoodiment of the invention, the wavelength of the photons ,s within the range from aoout ixl0-ll meters to about 4xlO8 meters. Preferably within this embodiment of the invention the detection means is a scintillation counter or a lithium drifted silicon detector.
In another embodiment of the invention, the wavelength of the photons is within the range from about 4xl0 8 meters to about 7x10-7 meters. Preferably within this embodiment of the invention the detection means is a photomultiplier tube or a photodiode.
In yet a further embodiment of the invention, the wavelength of the photons is within the range from aoout 7x10-7 meters to about 2xl0- 4 meters. Preferably within this embodiment of the invention the detection means is a photomultiplier tube or a photodiode.
The gaseous medium may comprise a single gas or a mixture of gases. In one embodiment of the invention, 3, 0 the gaseous medium comprises nitrogen. In yet another embodiment of the invention, the gaseous medium comprises helium.
0-
Claims (27)
1. A scanning electron microscope comprising: a vacuum envelope having a pressure limiting aperture; an electron beam source located within the vacuum envelope for emitting an electron beam; focusing means located within the vacuum envelope for directing an electron beam emitted by the electron beam source through the pressure limiting aperture; electron beam scanning means located within the vacuum envelope for scanning an electron beam emitted by the electron beam source across the diameter of the pressure limiting aperture; sample platform means, disposed outside the vacuum envelope, for 1 maintaining a sample in registration with the pressure limiting aperture such that a surface of the sample can be exposed to an electron beam 4 "f emitted from the electron beam source and directed through the pressure limiting aperture so as to cause radiation to be emitted from the sample; gas containment means for maintaining the sample platform means enveloped in a gaseous medium so as to allow said radiation emitted from the sample located on the sample platform means and exposed to an electron beam emitted from the electron beam source to come into contact with gas molecules of the gaseous medium and cause a signal-gas interaction that a produces a plurality of products; and detector means for detecting products formed by an interaction 9 of said radiation and said medium to produce image signals.
2. A microscope as claimed in claim 1 wherein said radiation comprises ph otons. S
3. A microscope as claimed in claim 2 wherein the wavelength of the photons is within the range from about 1 x 101 meters to about 4 x 8 meters.
4. A microscope as claimed in claim 3 wherein the detection means is a scintillation counter.
A microscope as claimed in claim 3 wherein the detection means is a lithium drifted silicon detector.
6. A microscope as claimed in claim 2 wherein the wavelength of the photons is within the range from about 4 x 10 8 meters to about 7 x 710 meters. meters. i i I~L l CrrC-119~ 11
7. A microscope as claimed in claim 6 wherein the detection means is a photomultiplier tube.
8. A microscope as claimed in claim 6 wherein the detection means is a photodiode.
9. A microscope as claimed in claim 2 wherein the wavelength of the photons is within the range from about 7 x 10 meters to about 2 x -4 meters.
A microscope as claimed in claim 9 wherein the detection means is a photomultiplier tube.
11. A microscope as claimed in claim 9 wherein the detection means is a photodiode.
12. A microscope as claimed in any one of the preceding claims wherein the gaseous medium comprises a single gas.
13. A microscope as claimed in any one of claims 1 to 11 wherein the Sgaseous medium comprises a mixture of gases.
14. A microscope as claimed in any one of claims 1-13 wherein the gaseous medium comprises nitrogen.
A microscope as claimed in any one of claims 1-13 wherein the gaseous medium comprises helium.
16. A method of microscopically imaging the surface of a sample said method comprising the steps of: surrounding the sample with a gaseous medium; scanning the surface of the sample with an electron beam having sufficient energy so as to cause radiation to be emitted from the surface of the sample; interacting said radiation with said gaseous medium to produce a plurality of products; and detecting said plurality of products to form images of the sample.
17. A method as claimed in claim 16 wherein said radiation comprises photons.
18. A method as claimed in claim 17 wherein the wavelength of the photons is within the range from about 1 x 1011 meters to about 4 x 8 meters. /78 N 2- Sw
19. A method as claimed in claim 17 wherein the wavelength of the j photons is within the range from about 4 x 10 meters to about 7 x u -7 meters.
A method as claimed in claim 17 wherein the wavelength of the photor is within the range from about 7 x 10 meters to about 2 x 4 meters.
21. A method as claimed in any one of claims 16-20 wherein the 4 gaseous medium comprises a single gas.
22. A method as claimed in any one of claims 16-20 wherein the gaseous medium comprises a mixture of gases.
23. A method as claimed in any one of claims 16-22 wherein the gaseous medium comprises nitrogen.
24. A method as claimed In any one of claims 16-22 wherein the i gaseous medium comprises helium. t'
25. A method as claimed in any one of claims 16 to 24 wherein the step of detecting said products to form images includes the counting of said products. 1
26. A scanning electron microscope substantially as described herein with reference to the drawing.
27. A method of microscopically imaging the surface of a sample substantially as described herein with reference to the drawing. DATED this SIXTH day of MARCH 1990 Electro-Scan Corporation Patent Attorneys for the Applicant SPRUSON FERGUSON c o LI* i .4 4 y 4:4. c 7
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU78023/87A AU597715B2 (en) | 1986-08-01 | 1987-07-30 | Scanning electron microscope |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AUPH7221 | 1986-08-01 | ||
| AUPH722186 | 1986-08-01 | ||
| AU78023/87A AU597715B2 (en) | 1986-08-01 | 1987-07-30 | Scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU7802387A AU7802387A (en) | 1988-02-24 |
| AU597715B2 true AU597715B2 (en) | 1990-06-07 |
Family
ID=25638803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU78023/87A Ceased AU597715B2 (en) | 1986-08-01 | 1987-07-30 | Scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| AU (1) | AU597715B2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3612859A (en) * | 1968-01-31 | 1971-10-12 | Westinghouse Electric Corp | Method for measuring and controlling the density of a metallic vapor |
| AU534811B2 (en) * | 1979-07-03 | 1984-02-16 | Unisearch Limited | Atmospheric scanning electron microscope |
-
1987
- 1987-07-30 AU AU78023/87A patent/AU597715B2/en not_active Ceased
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3612859A (en) * | 1968-01-31 | 1971-10-12 | Westinghouse Electric Corp | Method for measuring and controlling the density of a metallic vapor |
| AU534811B2 (en) * | 1979-07-03 | 1984-02-16 | Unisearch Limited | Atmospheric scanning electron microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| AU7802387A (en) | 1988-02-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PC | Assignment registered |
Owner name: FEI COMPANY Free format text: FORMER OWNER WAS: PHILIPS ELECTRONICS NORTH AMERICA CORPORATION |
|
| MK14 | Patent ceased section 143(a) (annual fees not paid) or expired |