AU5930196A - Dual side passive gas substrate thermal conditioning - Google Patents

Dual side passive gas substrate thermal conditioning

Info

Publication number
AU5930196A
AU5930196A AU59301/96A AU5930196A AU5930196A AU 5930196 A AU5930196 A AU 5930196A AU 59301/96 A AU59301/96 A AU 59301/96A AU 5930196 A AU5930196 A AU 5930196A AU 5930196 A AU5930196 A AU 5930196A
Authority
AU
Australia
Prior art keywords
thermal conditioning
dual side
side passive
substrate thermal
gas substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU59301/96A
Inventor
Richard S. Muka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Publication of AU5930196A publication Critical patent/AU5930196A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU59301/96A 1995-06-07 1996-05-23 Dual side passive gas substrate thermal conditioning Abandoned AU5930196A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US47274795A 1995-06-07 1995-06-07
US472747 1995-06-07
PCT/US1996/007650 WO1996041105A1 (en) 1995-06-07 1996-05-23 Dual side passive gas substrate thermal conditioning

Publications (1)

Publication Number Publication Date
AU5930196A true AU5930196A (en) 1996-12-30

Family

ID=23876783

Family Applications (1)

Application Number Title Priority Date Filing Date
AU59301/96A Abandoned AU5930196A (en) 1995-06-07 1996-05-23 Dual side passive gas substrate thermal conditioning

Country Status (2)

Country Link
AU (1) AU5930196A (en)
WO (1) WO1996041105A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10037566C2 (en) * 2000-08-02 2002-10-24 Karlsruhe Forschzent Substrate heating for simultaneous heating of both sides of a wafer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0333058Y2 (en) * 1987-06-26 1991-07-12
US5002010A (en) * 1989-10-18 1991-03-26 Varian Associates, Inc. Vacuum vessel
US5431700A (en) * 1994-03-30 1995-07-11 Fsi International, Inc. Vertical multi-process bake/chill apparatus

Also Published As

Publication number Publication date
WO1996041105A1 (en) 1996-12-19

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