AU563771B2 - Fabrication of integrated circuits - Google Patents

Fabrication of integrated circuits

Info

Publication number
AU563771B2
AU563771B2 AU36307/84A AU3630784A AU563771B2 AU 563771 B2 AU563771 B2 AU 563771B2 AU 36307/84 A AU36307/84 A AU 36307/84A AU 3630784 A AU3630784 A AU 3630784A AU 563771 B2 AU563771 B2 AU 563771B2
Authority
AU
Australia
Prior art keywords
fabrication
integrated circuits
circuits
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU36307/84A
Other versions
AU3630784A (en
Inventor
Andrew John BRAWLEY
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amalgamated Wireless Australasia Ltd
Original Assignee
Amalgamated Wireless Australasia Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amalgamated Wireless Australasia Ltd filed Critical Amalgamated Wireless Australasia Ltd
Priority to AU36307/84A priority Critical patent/AU563771B2/en
Publication of AU3630784A publication Critical patent/AU3630784A/en
Application granted granted Critical
Publication of AU563771B2 publication Critical patent/AU563771B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
AU36307/84A 1983-12-08 1983-12-08 Fabrication of integrated circuits Ceased AU563771B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU36307/84A AU563771B2 (en) 1983-12-08 1983-12-08 Fabrication of integrated circuits

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPG2757 1983-12-08
AU36307/84A AU563771B2 (en) 1983-12-08 1983-12-08 Fabrication of integrated circuits

Publications (2)

Publication Number Publication Date
AU3630784A AU3630784A (en) 1985-06-13
AU563771B2 true AU563771B2 (en) 1987-07-23

Family

ID=3723548

Family Applications (1)

Application Number Title Priority Date Filing Date
AU36307/84A Ceased AU563771B2 (en) 1983-12-08 1983-12-08 Fabrication of integrated circuits

Country Status (1)

Country Link
AU (1) AU563771B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69029046T2 (en) * 1989-03-16 1997-03-06 Sgs Thomson Microelectronics Contacts for semiconductor devices

Also Published As

Publication number Publication date
AU3630784A (en) 1985-06-13

Similar Documents

Publication Publication Date Title
GB2134708B (en) Integrated circuits
GB8714761D0 (en) Manufacture of integrated circuits
GB8421200D0 (en) Semiconductor integrated circuit
IL83547A0 (en) Manufacture of integrated circuits
AU582633B2 (en) Digital integrated circuits
GB8423124D0 (en) Bias circuit
GB8619512D0 (en) Semiconductor integrated circuit
AU573932B2 (en) Integrated circuit
AU2819384A (en) Integrated circuit module and method of making same
GB8327868D0 (en) Integrated circuits
GB8411125D0 (en) Latching circuits
GB8526959D0 (en) Fabrication of integrated structures
GB2146427B (en) Semiconductor manufacture
IL73844A0 (en) Manufacture of semiconductor devices
GB2139841B (en) Integrated circuit output stage
AU564558B2 (en) Integrated memory circuit of series-parallel-series type
GB8412360D0 (en) Integrated circuit
EP0135019A3 (en) Interconnection of elements on integrated cirrcuit substrate
GB8431534D0 (en) Semiconductor integrated circuit
GB8324713D0 (en) Circuits
GB8411875D0 (en) Circuits
GB8317178D0 (en) Switch-off circuits
AU563771B2 (en) Fabrication of integrated circuits
GB2133618B (en) Fabricating semiconductor circuits
EP0137245A3 (en) Semiconductor integrated circuit