AU556804B2 - Gas gate between chambers for semiconductor manufacture - Google Patents

Gas gate between chambers for semiconductor manufacture

Info

Publication number
AU556804B2
AU556804B2 AU17646/83A AU1764683A AU556804B2 AU 556804 B2 AU556804 B2 AU 556804B2 AU 17646/83 A AU17646/83 A AU 17646/83A AU 1764683 A AU1764683 A AU 1764683A AU 556804 B2 AU556804 B2 AU 556804B2
Authority
AU
Australia
Prior art keywords
chambers
semiconductor manufacture
gas gate
gate
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU17646/83A
Other versions
AU1764683A (en
Inventor
Joachim Doehler
David Attilio Gattuso
Kevin Richard Hoffman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Energy Conversion Devices Inc
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/407,983 external-priority patent/US4438724A/en
Priority claimed from US06/466,996 external-priority patent/US4500604A/en
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Publication of AU1764683A publication Critical patent/AU1764683A/en
Application granted granted Critical
Publication of AU556804B2 publication Critical patent/AU556804B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
AU17646/83A 1982-08-13 1983-08-05 Gas gate between chambers for semiconductor manufacture Ceased AU556804B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US06/407,983 US4438724A (en) 1982-08-13 1982-08-13 Grooved gas gate
US407983 1982-08-13
US06/466,996 US4500604A (en) 1982-02-18 1983-02-16 Bondings and composite films
US466996 1995-06-06

Publications (2)

Publication Number Publication Date
AU1764683A AU1764683A (en) 1984-02-16
AU556804B2 true AU556804B2 (en) 1986-11-20

Family

ID=27020087

Family Applications (1)

Application Number Title Priority Date Filing Date
AU17646/83A Ceased AU556804B2 (en) 1982-08-13 1983-08-05 Gas gate between chambers for semiconductor manufacture

Country Status (1)

Country Link
AU (1) AU556804B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3427057A1 (en) * 1984-07-23 1986-01-23 Standard Elektrik Lorenz Ag, 7000 Stuttgart SYSTEM FOR THE PRODUCTION OF SEMICONDUCTOR LAYER STRUCTURES BY EPITACTIC GROWTH

Also Published As

Publication number Publication date
AU1764683A (en) 1984-02-16

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Legal Events

Date Code Title Description
MK14 Patent ceased section 143(a) (annual fees not paid) or expired