AU546533B2 - Point-by-point scanning of an object - Google Patents

Point-by-point scanning of an object

Info

Publication number
AU546533B2
AU546533B2 AU76511/81A AU7651181A AU546533B2 AU 546533 B2 AU546533 B2 AU 546533B2 AU 76511/81 A AU76511/81 A AU 76511/81A AU 7651181 A AU7651181 A AU 7651181A AU 546533 B2 AU546533 B2 AU 546533B2
Authority
AU
Australia
Prior art keywords
point
object
scanning
point scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU76511/81A
Other versions
AU7651181A (en
Inventor
Gijsbertus Bouwhuis
Josephus Johannes Maria Braat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Priority to AU76511/81A priority Critical patent/AU546533B2/en
Publication of AU7651181A publication Critical patent/AU7651181A/en
Application granted granted Critical
Publication of AU546533B2 publication Critical patent/AU546533B2/en
Anticipated expiration legal-status Critical
Application status is Ceased legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
AU76511/81A 1981-10-16 1981-10-16 Point-by-point scanning of an object Ceased AU546533B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU76511/81A AU546533B2 (en) 1981-10-16 1981-10-16 Point-by-point scanning of an object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU76511/81A AU546533B2 (en) 1981-10-16 1981-10-16 Point-by-point scanning of an object

Publications (2)

Publication Number Publication Date
AU7651181A AU7651181A (en) 1983-04-21
AU546533B2 true AU546533B2 (en) 1985-09-05

Family

ID=3757453

Family Applications (1)

Application Number Title Priority Date Filing Date
AU76511/81A Ceased AU546533B2 (en) 1981-10-16 1981-10-16 Point-by-point scanning of an object

Country Status (1)

Country Link
AU (1) AU546533B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU570476B2 (en) * 1983-12-01 1988-03-17 Hughes-Jvc Technology Corporation Image registration system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU570476B2 (en) * 1983-12-01 1988-03-17 Hughes-Jvc Technology Corporation Image registration system

Also Published As

Publication number Publication date
AU7651181A (en) 1983-04-21

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