AU539640B2 - X-ray resists - Google Patents

X-ray resists

Info

Publication number
AU539640B2
AU539640B2 AU62983/80A AU6298380A AU539640B2 AU 539640 B2 AU539640 B2 AU 539640B2 AU 62983/80 A AU62983/80 A AU 62983/80A AU 6298380 A AU6298380 A AU 6298380A AU 539640 B2 AU539640 B2 AU 539640B2
Authority
AU
Australia
Prior art keywords
ray resists
resists
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU62983/80A
Other versions
AU6298380A (en
Inventor
Ari Aviram
Donald C. Hofer
Frank B. Kaufman
Steven Robert Kramer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of AU6298380A publication Critical patent/AU6298380A/en
Application granted granted Critical
Publication of AU539640B2 publication Critical patent/AU539640B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

AU62983/80A 1979-10-10 1980-10-06 X-ray resists Ceased AU539640B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US8349179A 1979-10-10 1979-10-10
US083491 1987-08-10

Publications (2)

Publication Number Publication Date
AU6298380A AU6298380A (en) 1981-04-16
AU539640B2 true AU539640B2 (en) 1984-10-11

Family

ID=22178690

Family Applications (1)

Application Number Title Priority Date Filing Date
AU62983/80A Ceased AU539640B2 (en) 1979-10-10 1980-10-06 X-ray resists

Country Status (3)

Country Link
JP (1) JPS5662247A (en)
AU (1) AU539640B2 (en)
CA (1) CA1161685A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125019A (en) * 1984-11-16 1986-06-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Manufacture of ic and photoconductive photoresist composite used therefor
JP2611338B2 (en) * 1988-06-20 1997-05-21 日本ビクター株式会社 Conductive polymer material
JP5819810B2 (en) * 2012-12-18 2015-11-24 信越化学工業株式会社 Negative resist material and pattern forming method using the same

Also Published As

Publication number Publication date
CA1161685A (en) 1984-02-07
JPS6245970B2 (en) 1987-09-30
JPS5662247A (en) 1981-05-28
AU6298380A (en) 1981-04-16

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