AU496073B2 - Slit exposure device - Google Patents

Slit exposure device

Info

Publication number
AU496073B2
AU496073B2 AU73770/74A AU7377074A AU496073B2 AU 496073 B2 AU496073 B2 AU 496073B2 AU 73770/74 A AU73770/74 A AU 73770/74A AU 7377074 A AU7377074 A AU 7377074A AU 496073 B2 AU496073 B2 AU 496073B2
Authority
AU
Australia
Prior art keywords
exposure device
slit exposure
slit
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU73770/74A
Other versions
AU7377074A (en
Inventor
Kitajima Tadayuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Filing date
Publication date
Priority claimed from JP10867673A external-priority patent/JPS5060235A/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of AU496073B2 publication Critical patent/AU496073B2/en
Publication of AU7377074A publication Critical patent/AU7377074A/en
Expired legal-status Critical Current

Links

AU73770/74A 1974-09-27 Slit exposure device Expired AU496073B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10867673A JPS5060235A (en) 1973-09-27 1973-09-27

Publications (2)

Publication Number Publication Date
AU496073B2 true AU496073B2 (en) 1976-04-01
AU7377074A AU7377074A (en) 1976-04-01

Family

ID=

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