AU4953685A - Capacitive sensing cell made of brittle material - Google Patents

Capacitive sensing cell made of brittle material

Info

Publication number
AU4953685A
AU4953685A AU49536/85A AU4953685A AU4953685A AU 4953685 A AU4953685 A AU 4953685A AU 49536/85 A AU49536/85 A AU 49536/85A AU 4953685 A AU4953685 A AU 4953685A AU 4953685 A AU4953685 A AU 4953685A
Authority
AU
Australia
Prior art keywords
capacitive sensing
brittle material
sensing cell
cell made
brittle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU49536/85A
Inventor
Roger L Frick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of AU4953685A publication Critical patent/AU4953685A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/028—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using capsules
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
AU49536/85A 1984-10-12 1985-10-08 Capacitive sensing cell made of brittle material Abandoned AU4953685A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/660,396 US4603371A (en) 1984-10-12 1984-10-12 Capacitive sensing cell made of brittle material
US660396 1984-10-12

Publications (1)

Publication Number Publication Date
AU4953685A true AU4953685A (en) 1986-05-02

Family

ID=24649380

Family Applications (1)

Application Number Title Priority Date Filing Date
AU49536/85A Abandoned AU4953685A (en) 1984-10-12 1985-10-08 Capacitive sensing cell made of brittle material

Country Status (7)

Country Link
US (1) US4603371A (en)
EP (1) EP0198018A1 (en)
JP (1) JPS62500544A (en)
AU (1) AU4953685A (en)
CA (1) CA1239806A (en)
IL (1) IL76640A0 (en)
WO (1) WO1986002447A1 (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4745810A (en) * 1986-09-15 1988-05-24 Rosemount Inc. Flangeless transmitter coupling to a flange adapter union
US5483834A (en) * 1993-09-20 1996-01-16 Rosemount Inc. Suspended diaphragm pressure sensor
US5424650A (en) * 1993-09-24 1995-06-13 Rosemont Inc. Capacitive pressure sensor having circuitry for eliminating stray capacitance
WO1995008759A1 (en) * 1993-09-24 1995-03-30 Rosemount Inc. Pressure transmitter isolation diaphragm
US5731522A (en) * 1997-03-14 1998-03-24 Rosemount Inc. Transmitter with isolation assembly for pressure sensor
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5747698A (en) * 1996-04-24 1998-05-05 Simmonds Precision Products Inc. Capacitive z-axis strain gauge
US5760311A (en) * 1996-11-25 1998-06-02 Cal Corporation Capacitive pressure transducer with reference capacitor
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
FR2775075B1 (en) * 1998-02-18 2000-05-05 Theobald Sa A DIFFERENTIAL PRESSURE SENSOR
US6681637B2 (en) * 2000-07-20 2004-01-27 Vega Grieshaber Kg Pressure-measuring cell with a temperature sensor
FR2818676B1 (en) * 2000-12-27 2003-03-07 Freyssinet Int Stup METHOD FOR DISASSEMBLING A PRE-STRESS CABLE AND DEVICE FOR IMPLEMENTING THE SAME
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
JP2005274265A (en) * 2004-03-24 2005-10-06 Nippon M K S Kk Flow meter
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7691723B2 (en) * 2005-01-07 2010-04-06 Honeywell International Inc. Bonding system having stress control
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
DE102005031345A1 (en) * 2005-07-05 2007-01-11 Robert Bosch Gmbh Force measuring element
US7412892B1 (en) * 2007-06-06 2008-08-19 Measurement Specialties, Inc. Method of making pressure transducer and apparatus
US7624642B2 (en) * 2007-09-20 2009-12-01 Rosemount Inc. Differential pressure sensor isolation in a process fluid pressure transmitter
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
JP5527015B2 (en) * 2010-05-26 2014-06-18 セイコーエプソン株式会社 Element structure, inertial sensor, electronic equipment

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4058788A (en) * 1976-04-05 1977-11-15 Bourns, Inc. Differential pressure transducer
CA1077294A (en) * 1976-05-03 1980-05-13 Honeywell Inc. Pressure transmitter with simplified pressure sensing head
US4207604A (en) * 1976-12-02 1980-06-10 Kavlico Corporation Capacitive pressure transducer with cut out conductive plate
US4168518A (en) * 1977-05-10 1979-09-18 Lee Shih Y Capacitor transducer
JPS5829862B2 (en) * 1977-05-14 1983-06-25 富士電機株式会社 pressure measuring device
DE2825222C2 (en) * 1978-06-06 1981-09-17 Siemens AG, 1000 Berlin und 8000 München Pressure transducer
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
JPS56102445U (en) * 1980-01-07 1981-08-11
US4301492A (en) * 1980-01-28 1981-11-17 Paquin Maurice J Pressure-sensing transducer
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
DE3238430A1 (en) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg DIFFERENTIAL PRESSURE SENSOR

Also Published As

Publication number Publication date
IL76640A0 (en) 1986-02-28
US4603371A (en) 1986-07-29
EP0198018A1 (en) 1986-10-22
CA1239806A (en) 1988-08-02
WO1986002447A1 (en) 1986-04-24
JPS62500544A (en) 1987-03-05

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