AU495231B2 - Improvements relating to field effect transistors - Google Patents

Improvements relating to field effect transistors

Info

Publication number
AU495231B2
AU495231B2 AU29877/77A AU2987777A AU495231B2 AU 495231 B2 AU495231 B2 AU 495231B2 AU 29877/77 A AU29877/77 A AU 29877/77A AU 2987777 A AU2987777 A AU 2987777A AU 495231 B2 AU495231 B2 AU 495231B2
Authority
AU
Australia
Prior art keywords
field effect
effect transistors
improvements relating
relating
transistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU29877/77A
Other versions
AU2987777A (en
Inventor
St Ai Zand Wolfgang Martin Fest Herman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Priority to AU29877/77A priority Critical patent/AU495231B2/en
Application granted granted Critical
Publication of AU495231B2 publication Critical patent/AU495231B2/en
Publication of AU2987777A publication Critical patent/AU2987777A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/3115—Doping the insulating layers
    • H01L21/31155—Doping the insulating layers by ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Toxicology (AREA)
AU29877/77A 1977-10-19 1977-10-19 Improvements relating to field effect transistors Expired AU495231B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU29877/77A AU495231B2 (en) 1977-10-19 1977-10-19 Improvements relating to field effect transistors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU29877/77A AU495231B2 (en) 1977-10-19 1977-10-19 Improvements relating to field effect transistors

Related Child Applications (1)

Application Number Title Priority Date Filing Date
AU68355/74A Division AU488100B2 (en) 1973-06-01 1974-04-29 Semiconductor devices having surface state control and method of manufacture

Publications (2)

Publication Number Publication Date
AU495231B2 true AU495231B2 (en) 1978-01-19
AU2987777A AU2987777A (en) 1978-01-19

Family

ID=3717866

Family Applications (1)

Application Number Title Priority Date Filing Date
AU29877/77A Expired AU495231B2 (en) 1977-10-19 1977-10-19 Improvements relating to field effect transistors

Country Status (1)

Country Link
AU (1) AU495231B2 (en)

Also Published As

Publication number Publication date
AU2987777A (en) 1978-01-19

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