AU495191B2 - A method of fabricating integrated circuits with oxidized isolation and the resulting structure - Google Patents

A method of fabricating integrated circuits with oxidized isolation and the resulting structure

Info

Publication number
AU495191B2
AU495191B2 AU15454/76A AU1545476A AU495191B2 AU 495191 B2 AU495191 B2 AU 495191B2 AU 15454/76 A AU15454/76 A AU 15454/76A AU 1545476 A AU1545476 A AU 1545476A AU 495191 B2 AU495191 B2 AU 495191B2
Authority
AU
Australia
Prior art keywords
integrated circuits
resulting structure
fabricating integrated
oxidized isolation
oxidized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU15454/76A
Other versions
AU1545476A (en
Inventor
Lea Peltzer Douglas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Camera and Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Camera and Instrument Corp filed Critical Fairchild Camera and Instrument Corp
Priority to AU15454/76A priority Critical patent/AU495191B2/en
Application granted granted Critical
Publication of AU1545476A publication Critical patent/AU1545476A/en
Publication of AU495191B2 publication Critical patent/AU495191B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H01L21/743—Making of internal connections, substrate contacts

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
AU15454/76A 1976-06-30 1976-06-30 A method of fabricating integrated circuits with oxidized isolation and the resulting structure Expired AU495191B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU15454/76A AU495191B2 (en) 1976-06-30 1976-06-30 A method of fabricating integrated circuits with oxidized isolation and the resulting structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU15454/76A AU495191B2 (en) 1976-06-30 1976-06-30 A method of fabricating integrated circuits with oxidized isolation and the resulting structure

Related Child Applications (1)

Application Number Title Priority Date Filing Date
AUN047138 Division 1976-06-30

Publications (2)

Publication Number Publication Date
AU1545476A AU1545476A (en) 1978-01-05
AU495191B2 true AU495191B2 (en) 1978-01-05

Family

ID=3705521

Family Applications (1)

Application Number Title Priority Date Filing Date
AU15454/76A Expired AU495191B2 (en) 1976-06-30 1976-06-30 A method of fabricating integrated circuits with oxidized isolation and the resulting structure

Country Status (1)

Country Link
AU (1) AU495191B2 (en)

Also Published As

Publication number Publication date
AU1545476A (en) 1978-01-05

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