AU482264A - - Google Patents

Info

Publication number
AU482264A
AU482264A AU5910673A AU5910673A AU482264A AU 482264 A AU482264 A AU 482264A AU 5910673 A AU5910673 A AU 5910673A AU 5910673 A AU5910673 A AU 5910673A AU 482264 A AU482264 A AU 482264A
Authority
AU
Australia
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU5910673A
Other versions
AU482264B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to AU59106/73A priority Critical patent/AU482264B2/en
Priority claimed from AU59106/73A external-priority patent/AU482264B2/en
Application granted granted Critical
Publication of AU482264A publication Critical patent/AU482264A/xx
Publication of AU482264B2 publication Critical patent/AU482264B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/34Gas-filled discharge tubes operating with cathodic sputtering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/3103Atomic absorption analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
AU59106/73A 1973-08-09 bya Provisional SPECTROCHEMICAL ANALYSIS Specification APPARATUS AND SAMPLE SUPPORTING MEANS THEREFOR Expired AU482264B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU59106/73A AU482264B2 (en) 1973-08-09 bya Provisional SPECTROCHEMICAL ANALYSIS Specification APPARATUS AND SAMPLE SUPPORTING MEANS THEREFOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU59106/73A AU482264B2 (en) 1973-08-09 bya Provisional SPECTROCHEMICAL ANALYSIS Specification APPARATUS AND SAMPLE SUPPORTING MEANS THEREFOR

Publications (2)

Publication Number Publication Date
AU482264A true AU482264A (de) 1975-02-13
AU482264B2 AU482264B2 (en) 1975-02-13

Family

ID=

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845041A (en) * 1985-11-20 1989-07-04 Analyte Corporation Atomic-absorption sputtering chamber and system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845041A (en) * 1985-11-20 1989-07-04 Analyte Corporation Atomic-absorption sputtering chamber and system

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