AU473789B2 - A method forthe production ofan anti-reflection coating on optical elements made of transparent thermally sensitive material, especially plastic - Google Patents

A method forthe production ofan anti-reflection coating on optical elements made of transparent thermally sensitive material, especially plastic

Info

Publication number
AU473789B2
AU473789B2 AU52654/73A AU5265473A AU473789B2 AU 473789 B2 AU473789 B2 AU 473789B2 AU 52654/73 A AU52654/73 A AU 52654/73A AU 5265473 A AU5265473 A AU 5265473A AU 473789 B2 AU473789 B2 AU 473789B2
Authority
AU
Australia
Prior art keywords
optical elements
sensitive material
reflection coating
elements made
thermally sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU52654/73A
Other languages
English (en)
Other versions
AU5265473A (en
Inventor
R. DOBLER and RUDOLF EICHINGER HERMANN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of AU5265473A publication Critical patent/AU5265473A/en
Application granted granted Critical
Publication of AU473789B2 publication Critical patent/AU473789B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Eyeglasses (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
AU52654/73A 1972-03-04 1973-02-27 A method forthe production ofan anti-reflection coating on optical elements made of transparent thermally sensitive material, especially plastic Expired AU473789B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEDE8221050 1972-03-04
DE2210505A DE2210505A1 (de) 1972-03-04 1972-03-04 Verfahren zur herstellung einer entspiegelungsschicht auf optischen elementen aus transparentem thermisch empfindlichem material, insbesondere aus kunststoff

Publications (2)

Publication Number Publication Date
AU5265473A AU5265473A (en) 1974-08-29
AU473789B2 true AU473789B2 (en) 1976-07-01

Family

ID=5837925

Family Applications (1)

Application Number Title Priority Date Filing Date
AU52654/73A Expired AU473789B2 (en) 1972-03-04 1973-02-27 A method forthe production ofan anti-reflection coating on optical elements made of transparent thermally sensitive material, especially plastic

Country Status (9)

Country Link
JP (1) JPS514865B2 (nl)
AT (1) AT322236B (nl)
AU (1) AU473789B2 (nl)
CH (1) CH549221A (nl)
DE (1) DE2210505A1 (nl)
ES (1) ES412299A1 (nl)
FR (1) FR2174920B1 (nl)
GB (1) GB1380025A (nl)
IT (1) IT979700B (nl)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4026292A (en) * 1974-09-17 1977-05-31 The Procter & Gamble Company Tampon having a mensesphilic foam treated with a liquid lubricant
DE2457474C3 (de) 1974-12-05 1978-10-19 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper
JPS5226237A (en) * 1975-08-25 1977-02-26 Ulvac Corp Process for treating the surface of a lens made of synthesized plastics
JPS5267647A (en) * 1975-12-03 1977-06-04 Matsushita Electric Ind Co Ltd Optical film
JPS52156643A (en) * 1976-06-23 1977-12-27 Nippon Chemical Ind Optical element of coated synthetic resin substrate
DE2738044C2 (de) * 1976-09-27 1984-11-29 AO Inc., Southbridge, Mass. Linse aus einem synthetischen Polymerisat
JPS5370836A (en) * 1976-12-07 1978-06-23 Ulvac Corp Method of coating nooreflect material onto plastic lens
DE3332872A1 (de) * 1983-09-12 1985-04-04 Optische Werke G. Rodenstock, 8000 München Reflexionsvermindernder belag fuer ein optisches element aus organischem material
DE4128547A1 (de) * 1991-08-28 1993-03-04 Leybold Ag Verfahren und vorrichtung fuer die herstellung einer entspiegelungsschicht auf linsen
DE102022207068A1 (de) 2022-07-11 2024-01-11 Carl Zeiss Smt Gmbh Linse für eine zum Betrieb im DUV ausgelegte mikrolithographische Projektionsbelichtungsanlage, sowie Verfahren und Anordnung zum Ausbilden einer Antireflexschicht

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356523A (en) * 1964-02-10 1967-12-05 Mc Donnell Douglas Corp Polystyrene film containing an antireflection coating

Also Published As

Publication number Publication date
AU5265473A (en) 1974-08-29
DE2210505A1 (de) 1973-09-20
CH549221A (de) 1974-05-15
IT979700B (it) 1974-09-30
JPS514865B2 (nl) 1976-02-16
JPS48104555A (nl) 1973-12-27
GB1380025A (en) 1975-01-08
ES412299A1 (es) 1976-01-01
AT322236B (de) 1975-05-12
FR2174920B1 (nl) 1976-06-11
FR2174920A1 (nl) 1973-10-19

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