AU456633B2 - Reactor and method of manufacturing a semiconductor device with the aid of said reactor - Google Patents

Reactor and method of manufacturing a semiconductor device with the aid of said reactor

Info

Publication number
AU456633B2
AU456633B2 AU26237/71A AU2623771A AU456633B2 AU 456633 B2 AU456633 B2 AU 456633B2 AU 26237/71 A AU26237/71 A AU 26237/71A AU 2623771 A AU2623771 A AU 2623771A AU 456633 B2 AU456633 B2 AU 456633B2
Authority
AU
Australia
Prior art keywords
reactor
aid
manufacturing
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU26237/71A
Other versions
AU2623771A (en
Inventor
CORNELIS EVERSTEYN and HERMANUS LEONARDUS PEEK FRANCISCUS
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of AU456633B2 publication Critical patent/AU456633B2/en
Publication of AU2623771A publication Critical patent/AU2623771A/en
Expired legal-status Critical Current

Links

AU26237/71A 1970-03-11 1971-03-08 Reactor and method of manufacturing a semiconductor device with the aid of said reactor Expired AU456633B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NLNL7003431 1970-03-11

Publications (2)

Publication Number Publication Date
AU456633B2 true AU456633B2 (en) 1972-09-14
AU2623771A AU2623771A (en) 1972-09-14

Family

ID=

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